Hitachi, Ltd.

Nissan Motor Company Limited

Takahiko Tanigami

Akira Hasegawa

Kenichi Ushiku

Akira Endo

Minoru Takahashi

Kenji Sekine

Kaoru Uchiyama

Kanji Kawakami

Seiko Suzuki

Motohisa Nishihara

Yutaka Misawa

Hiroaki Hachino

Yoichi Kaneko

Katsuhiro Kimura

Shigeru Horikoshi

Hitoshi Minorikawa

Harutoshi Tsujimura

Kenzo Hirashima

A semiconductor absolute pressure transducer assembly has a silicon diaphragm assembly and a covering member. The silicon diaphragm assembly has a circular pressure sensitive diaphragm, on the surface of which are diffused piezoresistors and conducting paths. The covering member composed of borosilicate glass has a circular well formed therein. On the surface of the silicon diaphragm assembly on which the piezoresistors and the conducting paths are diffused, a passivating layer of silicon dioxide is deposited. Further on the passivating layer, a conductive layer is formed by, for example, evaporating silicon. And the glass covering member is bonded on the silicon diaphragm assembly by anodic bonding. Namely, the silicon diaphragm assembly and the glass covering member are heated up to a certain high temperature and a relative high voltage applied across the conductive layer of the silicon diaphragm assembly and the glass covering members.

Semiconductor absolute pressure transducer assembly and method

There is disclosed a microwave integrated circuit device which comprises a waveguide circuit, a short-circuiting member serving as a short-circuiting plane and having a groove in the short-circuiting plane, means for varying the effective dimensions of the groove which have effect on microwave circuit components, a microwave integrated circuit formed on an insulating substrate so disposed as to cover the groove, and a semiconductor element disposed on the microwave integrated circuit to convert the microwave signal in the waveguide circuit into a selected one of a d.c. and a low-frequency, whereby the conversion efficiency may be increased by setting the peak position of the output level characteristic of the device at a desired frequency within a certain frequency band.

Microwave integrated circuit device for transmission/reception of a

An oil pressure detecting apparatus for an internal combustion engine comprises an LC oscillator having an inductance variable in dependence upon variation in the oil pressure of the engine. The frequency or voltage of an output signal of the oscillator is compared with that of a reference signal having a predetermined relation to the number of revolutions of the engine, thereby to determine if the oil pressure is within an acceptable range.

Oil pressure detecting apparatus for internal combustion engines

An acceleration detector using a combination of a bar magnet, an inertial substance or body and a fixed contact, in which the inertial substance is secured to the free end of a plate-spring supported in a cantilever fashion and having a pair of opposing curved portions.

Acceleration detector switch having magnetic biased conductive

This invention relates to a sensor suitable for detecting the collision speed of a car or the like. The sensor has a pair of spring members which are supported so as to intersect with each other between free ends and fixed ends thereof, a mass which is supported in the intersecting portion of the spring members, and electric contact members which are arranged at an operative position of the mass. When an intense impulsive force acts, the mass moves onto the operative position side against the springs while shifting the intersecting portion of the springs. In the process of the movement of the mass, the collision speed is detected.

Sensor having spring biasing structure to retain conductive bridging

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Mito, Japan

Takahiko Tanigami