Murata Kikai Kabushiki Kaisha

Tokyo Electron Limited

Murata Machinery, Ltd.

Takahiko Murayama

Shuji Akiyama

Takashi Nakao

Toshiki Moriguchi

Makoto Kawamoto

Takuya Okada

Ken Miyano

An autonomous moving apparatus includes a vehicle provided with a drive unit; a cover that is attached to the vehicle such that the cover either entirely or partially covers side, upper, and lower surfaces of the vehicle, and the cover is arranged to be displaced with respect to the vehicle; a detection unit arranged to output detection signals in accordance with relative displacement generated between at least one of the upper and lower surfaces of the vehicle and the cover facing at least one of the upper and lower surfaces; and a control unit arranged to control the drive unit in accordance with the detection signals output from the detection unit.

Autonomous moving apparatus

In an automated guided vehicle including a transfer equipment which transfers a wafer, a buffer cassette which temporarily stores the wafer, and a pressing member which is provided at an opening of the buffer cassette, when traveling the automated guided vehicle, if the pressing member is slid to a center position from an end position of the opening of the buffer cassette to contact and press against the edge of the wafer, the pressing member was easily damaged by being rubbed against a periphery of the wafer, and there was a problem in durability of the pressing member. The pressing membercan transfer between a 'pressing' position which contacts against the edge of the waferto press the wafer, and a 'receding' position which is located away from the edge of the wafer. A transferring direction A of the pressing memberof a moment in which the pressing membercontacts against the edge of the waferwhen the pressing membertransfers from the &#x201c;receding&#x201d; position to the &#x201c;pressing&#x201d; position, is approximately perpendicular to an outline of the part of the wafercontacted against the pressing member

Automated guided vehicle

The present invention provides a press with an automatic tool changing function which can reduce the amount of time required to change cartridges. A punch press uses cartridges with tools mounted thereon to press works W, and has a change position where the cartridges are changed. A cartridge transferring and loading device is provided which draws out the cartridges from the change position via a linear path L and transfers and loads the cartridges in a cartridge magazine located on an extension of the linear path L. The transferring and loading device has a cartridge moving-in and -out mechanism that moves both forward and backward to transfer and load the cartridges both in the punch press and in the magazine

Press with automatic tool changing function and tool cartridge changing device

Growing community of inventors

Kyoto, Japan

Takahiko Murayama