Shimadzu Corporation

Kobe Steel, Ltd.

Samsung Electronics Co., Ltd.

Takahide Hatahori

Kenji Takubo

Koki Yoshida

Yuya Nagata

Yoshihaya Imamura

Naoji Moriya

Hiroshi Horikawa

Chieko Imai

Takashi Tanaka

Naoto Mishina

Ryusuke Hioki

Hirofumi Okamoto

Tomotaka Nagashima

Masashi Hayakawa

Satoru Sugimoto

A defect inspection apparatus () includes an imager (image sensor) configured to image an inspection target, and a display () configured to display an image based on an image captured by the imager. The defect inspection apparatus () also includes a controller () configured or programmed to receive a setting of a marking () in a predetermined region of interest (S) on the image (still image) displayed on the display (). The controller () is configured or programmed to inspect the inspection target () for a defect based on the image captured by the imager, and superimpose an image of the marking () on a position corresponding to the predetermined region of interest (S) in an image of an inspection result (overlay image) displayed on the display ().

Defect inspection apparatus

A defect inspection apparatus () is configured to approximate a difference value or an absolute value (Iα) of the difference value between a pixel value in at least three captured images (A) captured by an imager in at least three different phases of an elastic wave and a pixel value in a reference image (A) separate from the captured images (A) so as to acquire an approximate value for defect inspection corresponding to an amount of change in the pixel value in the captured images (A).

Defect inspection apparatus and defect inspection method

A testing method for a joined body, in which a second pipe member having an outer diameter smaller than that of a first pipe member having at least one through hole is inserted into the first pipe member and the second pipe member is expanded to form a joining portion, the testing method includes: applying an elastic wave vibration to the joined body of the first pipe member and the second pipe member, for plural visual field regions at different positions in a circumferential direction of the joined body, acquiring a vibration distribution of the second pipe member measured through the through hole and a vibration distribution of the first pipe member in a visual field region including the joining portion of the first pipe member and the second pipe member, which are measured optically and in a batch, and determining quality of joining in the entire joining portion based on the acquired vibration distributions.

Joined body testing method, joined body testing device, and joined body

A defect inspection device () includes an excitation unit that excites an elastic wave, an irradiation unit () that applies laser lights, a measurement unit () that measures the interfered laser lights, and a control unit that acquires vibration state information which is information about a state of the elastic wave excited in an inspection target (P) for a plurality of frequencies by changing a frequency of excitation vibration caused by the excitation unit in order to excite the elastic wave in the inspection target (P), and extracts recommended frequencies (F) recommended for inspecting a defect of the inspection target (P) from among the plurality of frequencies based on the acquired vibration state information for the plurality of frequencies.

Defect inspection device and defect inspection method

A vibration measurement deviceincludes an excitation unit (signal generatorand vibrator) for exciting an elastic wave to an inspection target S, an illumination unit (wavelength stabilized laser beam sourceand illumination light lens) for performing stroboscopic illumination to a measurement region of a surface of the inspection target S using a wavelength stabilized laser beam source, a displacement measurement unit (speckle-sharing interferometer) for collectively measuring a displacement of each point of the measurement region in the back-and-forth direction by speckle interferometry or speckle-sharing interferometer. By using the wavelength stabilized laser beam source, an interference image can be obtained even when the inspection target S has large surface irregularities.

Vibration measurement device

In a defect detection device (), an input receiver () receives an input, by a user, of information concerning the kind and size of a defect expected to be present in or on a test object. An exciter () induces an elastic wave in the test object, with the frequency of the elastic wave being variable. A measurer () optically measures a vibration state of the surface of the test object caused by the elastic wave. A wavelength determiner () determines the wavelength of the elastic wave induced in the test object, based on the vibration state obtained by the measurer. A frequency selector () selects an appropriate frequency from a plurality of frequencies, based on the kind and size of the expected defect as well as the wavelength acquired for each of the plurality of frequencies by the wavelength determiner by varying the frequency of the elastic wave.

Defect detection device and defect detection method

The method for examining a clinched portion of a tubular body includes the steps of: giving an elastic vibration to a clinched bodyformed by clinching a tubular bodywith a clinch-target memberand acquiring, for each of a plurality of view areaswhich differ from each other in the position in the circumferential direction of the tubular bodya vibration distribution optically and simultaneously measured within the view areaincluding a clinched portionof the tubular bodyand the clinch-target memberto determine whether or not the state of clinching is satisfactory over the entire clinched portion

Method and device for examining clinched portion of tubular body

A displacement measurement deviceis provided with: a laser light sourcefor emitting laser light to a measurement area R of a measurement target object S; a focusing optical system (the beam splitter, the first reflecting mirror, the condenser lens) having a front focal point in the measurement area R and a rear focal point on a predetermined imaging surface (the detection surface); a non-focusing optical system (the beam splitter, the diffuser, the second reflecting mirror, and the condenser lens) in which light from a measurement area R of a correspondence point in the measurement area corresponding to each point of the imaging surface with respect to the focusing optical system is incident on the point of the imaging surface; and a photodetector (image sensor) configured to detect light intensity on the imaging surface for each point. Thus, corresponding to each of a large number of points in the measurement area R, main reflected light reflected at the point and reference light reflected at the surrounding range of the point are incident on each of a large number of points in the imaging surface, and the main reflected light and the reference light interfere at a large number of points in the imaging surface. Thus, an interference pattern is obtained.

Displacement measurement device and defect detection device

A defect inspection apparatus () is provided with and an excitation unit () for exciting elastic waves, an irradiation unit () for emitting laser light, a measurement unit () for measuring interference light, and a control unit (). The control unit is configured to acquire an image () representing a vibration state of an inspection target object () in a measurement area based on a measurement result of the measurement unit (), detect a discontinuous portion in a vibration state in the measurement area from the image representing the vibration state as a defect (), and identify a type of the defect based on at least one of a shape () of the detected defect and the vibration state of a defective portion.

This defect inspection apparatus () is provided with an excitation unit (), a laser illumination unit (), an interference unit (), an imaging unit (), and a control unit () for generating a moving image () related to the propagation of an elastic wave of an inspection target (). The control unit is configured to perform control to display an identified measurement inappropriate region () in such a manner as to be distinguishable from a measurement appropriate region () in which the vibration state has been correctly acquired in the moving image ().

This interference image imaging apparatus includes a first optical member () and a second optical member (), and has a first portion () for transmitting a first bundle of rays () to change a direction of outgoing light with respect to incident light, and a second portion () for changing a phase of second bundle of rays () with respect to the first bundle of rays ().

Interference image imaging apparatus

[PROBLEM] To provide a defect detection device capable of detecting not only a defect within a visible range but also a defect outside the visible range among the objects to be inspected. [SOLUTION] A defect detection deviceincludes: an excitation sourcecapable of being placed at any position on a surface of an inspection target object S, the excitation sourcebeing configured to excite an elastic wave within the inspection target object S, the elastic wave being predominant in one vibration mode and propagating in a predetermined direction; an illumination unit (pulsed laser light source, illumination light lens) configured to perform stroboscopic illumination on an illumination area of the surface of the inspection target object by using a laser light source; a displacement measurement unit (speckle shearing interferometer) configured to collectively measure a displacement of each point in a front-back direction within the illumination area in at least three different phases of the elastic wave, by speckle interferometry or speckle shearing interferometry; and a reflected wave/scattered wave detectorconfigured to detect either one or both of a reflected wave and a scattered wave of the elastic wave, based on the displacement measured by the displacement measurement unit.

Defect detection device

A defect inspection apparatus generates a surface layer inspection image which is an image representing displacement of an inspection target in a measurement region based on an intensity pattern of interfered laser light. The defect inspection apparatus is configured to generate an appearance inspection image which is an image of an outer surface of the measurement region based on an intensity pattern of incoherent light.

A defect detection deviceis provided with: a laser light sourcefor irradiating laser light to a measurement region R of a surface of an inspection object S; a laser light source control unitfor controlling the laser light source so as to cause laser light to be outputted continuously or quasi-continuously for a time longer than a period of vibration generated in the inspection object; an interferometer (speckle shearing interferometer) for generating interference light in which reflected light of the laser light reflected in the measurement region and reference laser light emitted from the laser light sourceinterfere; a detector (image sensor) for detecting the intensity of the interference light for each point in the measurement region R; a phase shifterfor shifting the phase of the reflected laser light or the reference laser light; an integrated intensity pattern determination unitfor obtaining an integrated intensity obtained by integrating the intensity for each point over an integration time longer the period of the vibration in three or more phases, the phase being shifted by the phase shifterinto three or more different phases; an interference degree distribution generation unitfor obtaining the distribution of the degree of interference based on the integrated intensity obtained in each of the three or more phases for each point; and a defect detection unitfor detecting a defect in the measurement region R based on the distribution of the degree of interference in the measurement region R.

Defect detection method and device

Provide an inspection apparatus and an inspection method capable of quickly inspecting a situation of joining between members in a joined body. The inspection apparatus is an inspection apparatus inspecting a situation of joining between a plurality of members in a joined body including the members joined to and overlapped one another.

Growing community of inventors

Kyoto, Japan

Takahide Hatahori