Denso Corporation

Nippondenso Co., Ltd.

Takafumi Taki

Yoshifumi Murakami

Masaaki Kuroyanagi

Toshihiro Okumura

Kazuo Tanaka

Michihiro Masuda

Hideaki Hara

Ryoichi Handa

Akira Nidan

Kaname Ban

A pressure sensor has a sensor chip with a diaphragm formed therein and bumps formed thereon, and a stem with leads extending from a surface thereof to the sensor chip. The bumps and the leads are electrically connected by face down bonding so that a surface of the sensor chip faces the surface of the stem. In this manner, bonding wires are unnecessary. Therefore, an area for disposing the bonding wires in the stem can be cut down, so that the pressure sensor can be miniaturized.

Sensor held by base having lead

An electronic part is disposed in a space defined by upper and lower frames joined together. The upper frame has an opening portion, and a hollow packing member is disposed in the opening portion to expose a specific region of the electronic part. The upper and lower frames are further covered with a cover having a window portion at a position corresponding to the hollow portion of the packing member. In this state, a thin film is formed through the hollow portion to coat the specific region of the electronic part. The thin film is not adhered to the upper and lower frames. Accordingly, the upper and lower frames can be reused to form the thin film onto another electronic part successively.

Method for producing semiconductor device by coating

A controller of a conveyance system efficiently conveys parts. The controller includes an input/output interface receiving data related to the position and loading state of data of each vehicle; receiving carry-in/out requests from each job shop; and outputting carry-in/out instructions to each vehicle. The controller also includes a ROM storing a control program; a RAM storing job shop positional data, carry-in/out requests, vehicle loading state data; and a processing section computing values of a carriage instruction (e.g., origin, destination, carrier to be carried, carrying route) given to each vehicle using the carry-in/out request data from each job shop and the data stored in the RAM based on the program stored in the ROM.

Controller of conveyance system

Growing community of inventors

Nagoya, Japan

Takafumi Taki