Hitachi High-tech Corporation

Adeka Corporation

Takaaki Kikuchi

Masaki Mizuochi

Akira Kojima

Junpei Hokari

Masayuki Arakawa

Tomokazu Kobayashi

Shuichi Nakagawa

Masashi Fujita

Akira Nishioka

Naoya Ishigaki

Tomotaka Shibazaki

Kenta Nomura

Takehiro Zushi

Hirohisa Nitoh

Keiichiro Hosobuchi

A semiconductor processing apparatus according to the present invention includes a main body cover that covers a main body device and a control device. The main body cover has a transfer opening for transferring a semiconductor, and the main body cover further has an intake port that generates an air flow in a horizontal direction inside the main body cover.

Ventilated semiconductor processing apparatus

Apparatus for evaluating semiconductor substrate

Semiconductor substrate transfer apparatus

An object of the present disclosure is to provide a charged particle beam device that can suppress an influence to a device generated according to the preliminary exhaust. In order to achieve the object, suggested is a charged particle beam device including a vacuum sample chamber that maintains an atmosphere around a sample to be irradiated with a charged particle beam in a vacuum state; and a preliminary exhaust chamber to which a vacuum pump for vacuuming an atmosphere of the sample introduced into the vacuum sample chamber is connected, in which the vacuum sample chamber is a box-shaped body including a top plate, and a portion between the top plate and a side wall of the box-shaped body positioned below the top plate includes a portion in which the top plate and the side wall are not in contact with each other.

Charged particle beam device

Disclosed is a method for epoxidizing olefins, which enables an epoxy compound containing no halogen atom with high yield. Specifically disclosed is an oxidizing agent composition for epoxidation of olefins, which is characterized by containing peroxide which exhibits basicity when dissolved in water and an acid anhydride.

Oxidizing agent composition for epoxidation and oxidation method thereof

Growing community of inventors

Tokyo, Japan

Takaaki Kikuchi