Mks Japan, Inc.

Taisei Amano

Isao Suzuki

A mass flow controller includes a photoelectric transducer for receiving information through an optical fiber and an electro-optical transducer for transmitting the result of detection of the mass flow through the optical fiber, thereby transmitting and receiving information through the optical fiber. Accordingly, the transmission and reception of data between the host computer and the mass flow controller performed through the optical fiber are not affected by electro-magnetic noise. Further, the mass flow controller can include a correction device responsive to a command from the host computer for correcting the result of a detection, to thereby accurately process the result of the detection because the result of the detection is corrected as required and then transmitted to the host computer as the correct data.

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Tokyo, Japan

Taisei Amano