Sumco Corporation

Japan Super Quartz Corporation

Taira Sato

Shuichi Ikehata

Manabu Shonai

Toshiaki Sudo

Shinsuke Yamazaki

Takuji Nishi

Takaya Satou

Minoru Shirakawa

Hiroshi Takahashi

A method of manufacturing a vitreous silica crucible includes: a taking-out process of taking out the vitreous silica crucible from the mold, a honing process of removing the unfused silica powder layer on the outer surface of the vitreous silica crucible, and further comprising, after the taking-out process and before the honing process, a marking process of marking an identifier comprised of one or more groove line on the outer surface of the vitreous silica crucible, wherein the groove line after the honing process has a cross-sectional shape of an inverse trapezoid and a depth of 0.2 to 0.5 mm, and a width of 0.8 mm or more at the opening of the groove line. The groove line is formed by repeating shifting a focal point of a laser.

Vitreous silica crucible and method of manufacturing the same

The present invention provides a method of manufacturing a vitreous silica crucible including: a taking-out process of taking out the vitreous silica crucible from the mold, a honing process of removing the unfused silica powder layer on the outer surface of the vitreous silica crucible, and further comprising, after the taking-out process and before the honing process, a marking process of marking an identifier comprised of one or more groove line on the outer surface of the vitreous silica crucible, wherein the groove line after the honing process has a depth of 0.2 to 0.5 mm, and a width of 0.8 mm or more at the opening of the groove line.

An object of the present invention is to provide a crucible handling device that can firmly sandwich and reliably move a quartz glass crucible under a clean environment and a method of handling a quartz glass crucible using the crucible handling device. The present invention provides a crucible handling devicefor handling a quartz glass crucible, the device including: a framehaving a beamextending in a horizontal direction and a pair of armsprotruding from the beamin a direction perpendicular to a central axis line direction of the beamsuch that at least one of the armsis able to move in the central axis line direction of the beama pair of sandwiching meansassembled with the pair of the armto face each other, for sandwiching a bodyof the quartz glass cruciblein a radial direction of the crucible; engagement meansprovided adjacent to each sandwiching meansand formed by a pair of tonguesmovable to approach or be separated from each other in a central axis direction of the crucible, for sandwiching and holding the quartz glass crucibletherebetween in the central axis direction of the crucible; and driving meansfor causing the sandwiching meansand the engagement meansto reciprocate along the arm. The present invention also provides a method of handling a quartz glass crucible using such a deviceas described above.

Handling device and handling method of quartz glass crucible

Growing community of inventors

Akita, Japan

Taira Sato