Oki Electric Industry Co., Ltd.

Taiji Tsuruoka

Susumu Shibata

A heating resistor includes a conductive material, and an electrically insulating material made of a mixture of silicon carbide (SiC) and carbon (C) having a carbon content of not less than 3 wt % based on the mixture. The resistor is formed by sputtering of a target of the conductive material and the electrically insulating material having at least 5 wt % of carbon. The conductive material and the electrically insulating material may be respectively provided as separate targets. The conductive material is at least one metal selected from tantalum, niobium, titanium, tungsten, molybdenum, zirconium and chromium.

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Tokyo, Japan

Taiji Tsuruoka