Fujikin Inc.

Taiji Chiba

Izuru Shikata

Tomohiro Hashizume

Michio Yamaji

Ryousuke Dohi

Tsuneyuki Okabe

Tadayuki Yakushijin

Kazunari Watanabe

Toshiyuki Inada

Tatsuhiko Sato

A fluid heater includes: a passage member having a passage formed therein; a heater for heating the passage member; a fixing member for fixing the passage member to a fluid control device; and a connection member connected to the passage member so as to allow fluid to flow into the passage member. The passage has a helical shape.

Fluid heater, fluid control apparatus, and production method for fluid heater

Provided is a flow rate adjustment valve of a motor-operated valve type, which overcomes the problems that flow rate adjustment valves of a manual valve type have, while making full use of compactness the manual valves have. The flow rate adjustment valve includes a rotation device that rotates a rotation member to cause a vertically movable body to move vertically. The rotation device includes: a driven gear disposed at an upper end portion of the rotation member; and a motor that rotates a driving gear engaged with the driven gear. The motor, which is a stepping servo motor, is disposed below the driving gear and has a rotary shaft extending upward. The driving gear is fixed to an upper end portion of the rotary shaft.

Flow rate adjustment valve, and fluid control apparatus in which the flow rate adjustment valve is used

A valve device has a valve main body and a tube fitting that has an air passage for supplying operation air into the valve main body. An upper lid portion of a cap is formed with a fitted hole provided with a projection. The tube fitting has a fitting portion to be fitted into the upper lid portion. The fitting portion is formed with, on an outer circumference thereof, a fitting groove to which the projection is fitted, and has a tip end portion located closer to a tip end side than the fitting groove.

Valve device, fluid control apparatus, and semiconductor manufacturing apparatus

Valve

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Osaka, Japan

Taiji Chiba