Industry-University Cooperation Foundation Hanyang University

Skhynix Inc.

Lg Energy Solution, Ltd.

Taeseup Song

Minchul Jang

Byoungkuk Son

Eunkyung Park

Ungyu Paik

Hyun Goo Kang

Jong Young Cho

Seho Sun

Dongsoo Lee

Cheolmin Shin

Dong Hyeok Kim

A CMP slurry composition for polishing a boron silicon (B—Si) compound may include a catalyst, an abrasive including a plurality of particles and being configured to polish the boron silicon (B—Si) compound, and a pH adjuster. The CMP slurry composition may further include an oxidizer. The catalyst may have a binary catalyst configuration comprising a first catalyst material and a second catalyst material. The first catalyst material may include Fe, and the second catalyst material may include Cu. The oxidizer may include hydrogen peroxide (HO). A CMP (chemical mechanical polishing) method for a boron silicon (B—Si) compound may include providing a substrate structure including a thin film formed of the boron silicon (B—Si) compound and performing a CMP process on the thin film. The CMP process is performed by using the CMP slurry composition.

Chemical mechanical polishing slurry composition for polishing boron silicon compound, chemical mechanical polishing method and method of fabricating semiconductor device using the same

A negative electrode for a lithium secondary battery including a lithium metal layer and a protective layer including a three-dimensional structural body made of metal and lithium nitride on the lithium metal layer. The protective layer induces uniform ionic conductivity and electrical conductivity on the surface of the negative electrode. A method for manufacturing method a negative electrode for a lithium secondary battery including the steps of forming a metal hydroxide having a three-dimensional structure, forming a metal nitride having a three-dimensional structure by a nitridation reaction of the metal hydroxide of the three-dimensional structure; and transferring the metal nitride having the three-dimensional structure onto a lithium metal layer to form a protective layer. A lithium secondary battery including the negative electrode for a lithium secondary battery.

Negative electrode comprising a protective layer for a lithium secondary battery, method for manufacturing same, and lithium secondary battery including same

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Seoul, South Korea

Taeseup Song