Samsung Electronics Co., Ltd.

Taeksoo Jeon

Jongmin Baek

Sanghoon Ahn

Kyu-Hee Han

Jaesung Hur

Jangho Lee

An image sensor includes a semiconductor substrate having a plurality of pixel regions arranged in a first direction and a second direction that are parallel to an upper surface of the semiconductor substrate. The first direction is perpendicular to the second direction. A grid structure extends in the first direction and the second direction on the semiconductor substrate to define openings corresponding to a plurality of sub-pixel regions of the plurality of the pixel regions, respectively. Color filters are disposed in the openings of the grid structure, respectively. A protective layer covers sidewalls of the grid structure and bottom surfaces of the color filters. The protective layer includes silicon oxide including carbon (C) or nitrogen (N).

Growing community of inventors

Hwaseong-si, South Korea

Taeksoo Jeon