Samsung Display Co., Ltd.

Taek Kyo Kang

Min Ju Kim

Young Eun Ryu

Jae Suk Moon

Soo Hyun Min

Jung Woo Ko

Min Goo Kang

Su Cheol Gong

A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.

Mask assembly, deposition apparatus including the same, and fabricating method of the mask assembly

A mask and a method of manufacturing a mask assembly, the mask including a body, and the body including one end and another end facing each other in a length direction and having a first surface and a second surface facing each other in a thickness direction; and a pattern region between the one end and the other end, the pattern region including a plurality of pattern holes and a plurality of ribs between the plurality of pattern holes, wherein a curl value of the mask, which is defined as a shortest distance from a plane tangent to a center of the body to the one end or the other end of the body, is 1,000 &#x3bc;m to 4,000 &#x3bc;m.

Mask and method of manufacturing mask assembly including the same

Provided are a mask assembly and a method of fabricating the same. The mask assembly includes a mask frame in which a frame opening is formed therein and insulation grooves are formed at both sides of a first direction with the frame opening therebetween. The mask has both ends disposed at the both sides and includes a plurality of pattern open parts configured by a plurality of pattern openings between the both ends. A movement member is provided in the insulation groove, to which the both ends of the mask are fixed, and which includes a movement block moving in the first direction and a second direction intersecting the first direction.

Mask assembly and method of fabricating the same

A mask tensioning apparatus is disclosed. In one embodiment, the mask tensioning apparatus includes: i) a clamp supporting a mask sheet disposed on the mask frame to couple the mask sheet to the mask frame and ii) a tensioner connected to the clamp and applying a tensioning force to the clamp to fix the mask sheet fixed by the clamp to the mask. The clamp may be arranged in a substantially vertical or oblique direction with regard to the elongation direction of the mask sheet, thereby supporting the mask sheet.

Growing community of inventors

Suwon-si, South Korea

Taek Kyo Kang