Samsung Corning Precision Materials Co., Ltd.

Corning Precision Materials Co., Ltd.

Taejung Park

Seo Hyun Kim

SeoHyun Kim

Jeongwoo Park

YoungZo Yoo

SooHo Park

Sang Jun Yim

Myong Woon Kim

GunSang Yoon

Hyung Soo Shin

Sang Ick Lee

Seung Ho Yoo

Sang Do Lee

Eun-Ho Choi

Bogyeong Kim

Gun Sang Yoon

Young Zo Yoo

Junehyoung Park

A zinc oxide precursor for use in deposition of a zinc oxide-based thin film contains a zincocene having the following formula or a derivative thereof: 

Zinc oxide precursor and method of depositing zinc oxide-based thin film using the same

A zinc oxide precursor for use in deposition of a zinc oxide-based thin film contains an alkyl zinc halide having the following formula: R&#x2014;Zn&#x2014;X, where R is an alkyl group CH, and X is a halogen group. The n is a number ranging from 1 to 4, and the alkyl group is one selected from among a methyl group, an ethyl group, an i-propyl group and a t-butyl group. The halogen group contains one selected from among F, Br, Cl and I. A method of depositing a zinc oxide-based thin film includes loading a substrate into a deposition chamber; and supplying the zinc oxide precursor which contains the above-described alkyl zinc halide and an oxidizer into the deposition chamber and forming a zinc oxide-based thin film on the substrate via chemical vapor deposition. The zinc oxide-based thin film is deposited on the substrate via atmospheric pressure chemical vapor deposition.

Zinc oxide precursor containing alkyl zinc halide and method of depositing zinc oxide-based thin film using the same

A light-emitting device and a method of fabricating the same, in which the light emission characteristics of the light-emitting device in the UV range are maximized such that a high-efficiency light-emitting device can be produced at low cost. For this, the method includes the step of forming a zinc oxide light-emitting layer on a base substrate, the zinc oxide light-emitting layer including zinc oxide doped with a dopant; and activating the dopant by rapidly heat-treating the zinc oxide light-emitting layer, so that light emission in an ultraviolet range is increased.

Light-emitting device and method of fabricating the same

Growing community of inventors

Chungcheongnam-do, South Korea

Taejung Park