Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 131,214 patents)
1 patent:
1. 12390763 - Apparatus trapping an exhaust material from a substrate-processing process and apparatus for processing a substrate including the trapping apparatus