Samsung Electronics Co., Ltd.

Qray Inc.

Tae-Young Kwon

Jeong-Nam Han

Young-Sang Kim

Chang-Sun Hwang

Suk-Hoon Jeong

Geun-Kyu Choi

Sang-Hak Lee

Jeong-Hoon Lim

Hyung-Kyu Jin

A method of controlling a chemical mechanical polishing (CMP) process, a temperature control, and a CMP apparatus, the method including measuring actual temperatures of at least two regions in a platen in real time during the CMP process in which a polishing pad attached to the platen polishes a substrate held by a polishing head using slurry and deionized water; receiving the measured actual temperatures of the regions; and individually controlling the actual temperatures of the regions in real time during the CMP process to provide the regions with a predetermined set CMP process temperature.

Method of controlling a temperature of a chemical mechanical polishing process, temperature control, and CMP apparatus including the temperature control

Disclosed are a light irradiating device for enhancing cell-mediated immunity and a method using the same. The light irradiating device generates a radiation with a specific peak wavelength at 610&#xb1;20 nm or 710&#xb1;30 nm which activates the structure of proteins involved in the activation of T lymphocytes responsible for cell-mediated immunity thus effecting immunopotentiation.

Method for enhancing cell-mediated immunity

Growing community of inventors

Seoul, South Korea

Tae-Young Kwon