Samsung Electronics Co., Ltd.

Tae-Jun Ahn

Young Yoo Heo

Myoung-Ki Ahn

Jin-Woo Ahn

Tae-yong Jo

Young-Gwon Kim

An optical module for surface inspection includes a first light source unit that illuminates a substrate with first light produced by a first light source and a first beam splitter that changes the path of the first light, a second light source unit that illuminates the substrate with second light polarized in a first direction, a direction of polarization changing unit that illuminates the substrate with the third light polarized in a second direction perpendicular to the first direction, and a detection unit that detects fourth light which is a product of the first light reflecting from the substrate, fifth light which is a product of the second light scattered from the substrate, and sixth light which is a product of the third light scattered from the substrate. The third light is produced by changing the direction of polarization of the second light reflected from the inspected substrate.

Growing community of inventors

Seongnam-si, South Korea

Tae-Jun Ahn