Lg Display Co., Ltd.

Lg Electronics Inc.

Avaco Co., Ltd.

Tae Hyun Lim

Hwan Kyu Yoo

Yang Sik Moon

Byung Han Yun

Kwang Jong Yoo

Sung Eun Kim

Hyun Joo Jeon

Ji Young Oh

Hyuk Sang Yoon

Byeong Cheol An

A sputtering apparatus includes a susceptor for receiving a substrate, and a first target device disposed to be opposite to a center region of a substrate and at least second and third target devices disposed to be opposite to peripheral regions of the substrate, wherein the second and third target devices are rotatable.

Sputtering apparatus, method of operating the same, and method of manufacturing substrate using the same

A sputtering apparatus for depositing a target material on a substrate includes a chamber, a target in the chamber to provide the target material, a carrier to carry the substrate in the chamber to face the target, and a plurality of masks arranged along sides of the carrier and being movable back and forth with respect to the carrier.

Sputtering apparatus and driving method thereof

An inclined carrier transferring apparatus for use inline sputtering equipment. The inclined carrier transferring apparatus includes rollers and a guiding portion. The rollers transfer and support the bottom of a carrier. The guiding portion is installed diagonally with respect to the rollers, to support the top of the carrier in a non-contact manner.

Inclined carrier transferring apparatus

There is provided a support platform of a non-contact transfer apparatus. The support platform includes a plurality of first holes for introducing air on a surface of the support platform, and a plurality of second holes for removing the air introduced through the first holes. At least one of a size and a number of the first holes varies in a direction from a central portion of the support platform to peripheral portions of the support platform, and the second holes are identically formed to one another.

Support platform of non-contact transfer apparatus

Growing community of inventors

Gyeongbuk, South Korea

Tae Hyun Lim