Fujitsu Corporation

Other

Tokyo Electron Limited

Tadayuki Kojima

Yoshio Watanabe

Yoshinobu Ono

Haruhisa Mori

Shuji Kikuchi

Shinjiro Tanida

Mitsuhiro Dekune

Hiroshi Ohmori

Satoshi Hasui

Koichi Tamatsu

A ball joint comprises: a ball stud having a spherical head at an end thereof; a ball seat into which the spherical head is slidably fitted so as to universally support the ball stud; and a housing for accommodating the ball seat. The ball seat and the housing have surfaces opposing each other, and recesses communicated with each other are formed on the surfaces. The recesses are filled with a resin, so that relative movement of the ball seat with respect to the housing is restricted.

Ball joint and assembling method therefor

A polishing apparatus of the present invention comprises an amplifier for amplifying a first signal being input from the vibration detecting device attached on a second surface plate to then output a second signal, a gain indicator for determining unsuitableness of a gain of the amplifier based on a magnitude of the second signal output from the amplifier and then indicating correction of said gain, a gain adjuster for adjusting the gain of the amplifier based on a gain correction signal output from the gain indicator, a polishing end-point analyzing portion for determining an end-point of polishing based on change in the second signal, and a control portion for terminating drive of the first surface plate based on a polishing end-point signal being output from the polishing end-point analyzing portion.

End point polishing apparatus and polishing method

A magnetic levitating transportation apparatus comprising a rail and a vehicle capable of travelling along the rails by a linear motor and caused to magnetically levitate by magnet units including permanent magnets and electro-magnets. The gap between the rail and each of the magnetic units is controlled by controlling the current supplied to the magnet units so that the current is substantially zero when the vehicle is in the levitated condition. One of the magnet units is movably mounted to the vehicle and moved by the piezoelectric actuator so that the gap between this magnet unit and the rail can be adjusted. The controller controls the piezoelectric actuator based on the current supplied to the magnet units.

Magnetic levitating transporting apparatus with a movable magnetic unit

A primary particle beam irradiation apparatus comprising a stage on which a target is placed; a device for irradiating a predetermined scan region on the stage with a primary particle beam; a secondary ion sensor for detecting a secondary ion, generated by an irradiation of the primary particle beam, from the stage or the target; and a device, connected to the irradiating device and the secondary ion sensor, for controlling the irradiating means on the basis of an output signal from the secondary ion sensor. Further, a method for irradation of a primary particle beam comprising the step of detecting the irradiation position of a primary particle beam scanned on a target over a predetermined width or predetermined region by using the output of a secondary ion sensor provided near the surface of the target; the step of correcting the deviation of the irradiation position based on the information of the irradiation position which is detected, and further scanning the primary particle beam to irradiate the surface of the target based on the information obtained at the correction step.

Primary particle beam irradiation apparatus and method of irradiation

Growing community of inventors

Kanagawa, Japan

Tadayuki Kojima