Central Glass Company, Limited

Other

Asahi Kasei Kogyo Kabushiki Kaisha

Agency of Industrial Science and Technology

Neriki Valve Co., Ltd.

Tadayuki Kawashima

Tatsuo Hatano

Akifumi Yao

Isamu Mori

Mitsuya Ohashi

Tetsuya Tamura

Masahiko Matsudo

Tomonori Umezaki

Masayuki Kawaguchi

Masaru Takeda

Kaoru Mori

Tatsuo Miyazaki

Isamu Mouri

Tamikuni Komatsu

Keiji Sato

Kenji Tanaka

Hiromi Sasaki

Takanori Hamana

Shuzo Fujiwara

Shigenori Sakai

Shu Usuba

Sunao Yamamoto

Yozo Kakudate

Masatake Yoshida

Mituo Takahata

Shouichi Tsujioka

Katsuharu Kasami

Katsutoshi Aoki

Hiroyuki Yokoi

Hisakazu Itou

Koichi Saji

Koichi Kaminaga

Koji Miyazaki

A cleaning gas includes HF gas whose concentration is greater than or equal to 1 vol % and oxygen containing gas whose concentration ranges from 0.5 to 99 vol %. The oxygen containing gas includes at least one of O gas, O gas, N O gas, NO gas, CO gas and CO gas. The cleaning gas is employed to remove a deposited material generated in a vacuum treatment apparatus for producing a thin film of at least one of Ti, W, Ta, Ru, Ir, a compound thereof and an alloy thereof.

Cleaning gas and method for cleaning vacuum treatment apparatus by flowing the cleaning gas

The present invention relates to a method for producing an electrolytic solution containing a solute of lithium hexafluorophosphate. This method includes a step of (a) reacting lithium fluoride with phosphorus pentafluiride, in a nonaqueous organic solvent that is used for producing a lithium cell's electrolytic solution, thereby to form the lithium hexafluorophosphate dissolved in the solvent. According to this method, both yield and purity of the reaction product are sufficiently high, and the reaction can easily be managed. According to need, after the step (a), the nonaqueous organic solvent may be replaced with another nonaqueous organic solvent. The present invention further relates to a method for purifying an electrolytic solution used for a lithium cell. This electrolytic solution contains an acid impurity having at least one hydrogen atom in the molecule. this method includes steps of (a) adding at least one hydrogen-free halide selected from chlorides, bromides and iodides, to the electrolytic solution, such that the acid impurity is reacted with the at least one hydrogen-free halide, thereby to form at least one hydrogen halide selected from hydrogen chloride, hydrogen bromide and hydrogen iodide; and (b) purging the at least one hydrogen halide from the electrolytic solution to purify the electrolytic solution. The acid impurity concentration of the electrolytic solution is substantially reduced by this method.

Electrolytic solution for lithium cell and method for producing same

The present invention provides a method for producing trifluoromethanesulfonyl chloride. This method includes the step of reacting trifluoromethanesulfonic acid with phosphorous trichloride and chlorine. With this method, trifluoromethanesulfonyl chloride can be easily and highly selectively produced at high yield. The reaction may be carried out at about atmospheric pressure. Furthermore, the reaction may be carried out in the presence of phosphorus oxychloride either under a pressurized condition or at about atmospheric pressure.

Method for producing trifluoromethanesulfonyl chloride

A cleaning gas which is employed to remove an unnecessary deposited material formed in a thin film forming apparatus by thermal decomposition of pentaethoxytantalum or tetraethoxysilane without damaging a reactor, tools, parts and piping of a silicon oxide film-forming apparatus or a tantalum oxide film-forming apparatus. The cleaning gas comprises HF gas and at least one of an oxygen-containing gas, a fluorine gas, a chlorine fluoride gas, a bromine fluoride gas and an iodine fluoride gas.

Cleaning gas

In order to produce a new substance having a diamond crystal structure, the following steps are taken in order. First, a graphite-like substance is prepared which contains boron (B), carbon (C) and nitrogen (N) as main elements. Then, the graphite-like substance is mixed with a metal powder to produce a mixture. Then, a pressure is applied to the mixture to produce a molded body, and then an explosion pressure is applied to the molded body.

Polycrystalline BCN substance and method of producing same

Growing community of inventors

Saitama, Japan

Tadayuki Kawashima