Sanyo Electric Co., Ltd.

Tadayoshi Takada

Hirotsugu Hata

Nobuyuki Sekikawa

Chikao Fujinuma

Shigeaki Okawa

Tsuyoshi Takahashi

Osamu Kitamura

Teruo Tabata

Yoshiaki Sano

Toshimasa Sadakata

Toshiyuki Ohkoda

Satoru Kaneko

Yasunari Tagami

Kazuo Takeda

Keizi Mita

Yasuhiro Tamada

Collector regions ( ) with films capable of withstanding high voltage by laminating 4 epitaxial layers when the collector regions ( ) are formed. In order to reduce effects caused by interference between the transistors ( ) and also reduce parasitic transistor, the epitaxial layers and substrate are etched in a V-groove. Each etched region is dielectrically isolated by the poly-Si ( ).

Semiconductor integrated circuit device

A buried layer of a collector region and a buried layer of a collector taking-out region are formed at the same time at each epitaxial layer when the collector region and the collector taking-out region of the semiconductor integrated circuit device according to the invention. Each buried layer is diffused to connect, and etched in V-groove. By that, the collector region and collector taking-out region made thick in film are formed at the same time so as to realize the semiconductor integrated circuit device of high withstanding voltage.

Method for manufacturing semiconductor integrated circuit device

A semiconductor IC including a resistance element on a circuit substrate. The resistance element includes a resistance layer formed on an insulating layer. The resistance layer is formed using a Si layer obtained by forming an a-Si layer, doping the a-Si layer with impurities, and heating the doped a-Si layer to diffuse the impurities while substantially preserving the fineness of the a-Si layer surface. Preferably, a SiN layer is provided lying beneath the resistance layer. A capacitor may be integrated on the same circuit substrate where the resistance element is formed. In this case, a lower electrode, a SiN dielectric layer, and an upper electrode are formed in this order to constitute a capacitor. The SiN dielectric layer of the capacitor is formed extending from a capacitor formation region to another region, so that the resistance layer of the resistance element is formed on the extending SiN dielectric layer. The lower and upper electrodes of the capacitor may be formed using an a-Si layer, similar to the resistance layer.

Semiconductor integrated circuit and manufacturing method thereof

An optical semiconductor is integrated with a transistor by epitaxially growing a lightly doped epitaxial layer on a substrate. One isolated island area of the epitaxial layer contains a diffusion area on its surface to form the optical semiconductor. A second isolated island area has its conductivity type inverted by a buried layer that is diffused upward into contact with a surface layer that is diffused downward. The upward-diffused and downward-diffused layers unite to form a collector of the transistor. A base area in the surface of the collector contains an emitter in its surface. The emitter and the diffusion area are formed of the same material, and in the same process steps.

Semiconductor integrated circuit with photo diode

A method of making a semiconductor integrated circuit provided with an isolating region constituted of an upper and lower isolating regions, and integrated circuit element regions is disclosed, wherein: the lower isolating region is diffused upward to a depth of a little more than half the thickness of an epitaxial layer to link with the upper isolating region prior to a doping of the upper isolating region; the doping of the lower isolating region and integrated circuit element regions, is implemented by means of ion implantation through a resist film which is capable of blocking ions implanted and in which specified doping windows have been formed in advance, and a SiO.sub.2 film is used as a reference mask in an ion implanting step, and the respective borders of the upper isolating region and the specified regions of the circuit elements is determined by self-alignment. The method has advantages that the upper isolating region can be prepared by heat-treatment for relatively short time, reducing lateral diffusion and the occupied area thereof, and slippage by masking is remarkably reduced, providing a semiconductor integrated circuit with high density.

Method for manufacturing a semiconductor integrated circuit

After a base region and a base contact region, a diffused resistance region and a pair of contact regions formed at each end of the diffused resistance region are formed, an silicon oxide film of essentially uniform thickness is formed anew on the surface of an epitaxial layer. In the silicon oxide film, a collector contact/doping window, a base contact window, an emitter contact/doping window, a lower layer electrode contact window, and a diffused resistance element contact window are formed simultaneously, then the base contact region and the diffused resistance element contact regions are shielded by a mask and a collector contact region, an emitter contact region, and a lower layer electrode contact region are doped. The method of manufacturing a semiconductor integrated circuit of the present invention has the advantages that all insulating films have a uniform film thickness, eliminates the problems of side etching when the contact windows or dopant windows are formed or of etching the element regions. It is possible to form element regions of the design size and a large margin of spacing for the isolating regions and the base region is unnecessary. A high degree of integration can be achieved.

Method for manufacturing a semiconductor integrated circuit including a

A method of manufacturing a semiconductor integrated circuit comprises the steps of: forming an epitaxial layer covering a semiconductor substrate and buried layers; forming isolation regions dividing the epitaxial layer into a plurality of islands; forming a lower electrode region of an MIS type capacitor in one of the islands; forming a base region of a vertical bipolar transistor simultaneously with or independently from the lower electrode in another island; depositing a thin dielectric layer of the MIS type capacitor on a portion of the lower electrode region; thereafter selectively diffusing impurities into the surface layer of the base region so as to form an emitter region of the vertical bipolar transistor; and forming an upper electrode of the MIS type capacitor on the thin dielectric layer.

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Gunma, Japan

Tadayoshi Takada