Tokyo Electron Limited

Nippo Precision Co., Ltd

Tadayoshi Hosaka

Shigekazu Komatsu

Junichi Hagihara

Kunihiro Furuya

Naoki Muramatsu

A wafer inspection system is provided. The wafer inspection system includes: a transfer region in which a transfer device is arranged; an inspection region in which test heads for inspecting a substrate are arranged; and a maintenance region in which the test heads are maintained. The inspection region is located between the transfer region and the maintenance region, a plurality of inspection rooms accommodating the test heads are adjacent to each other in the inspection region, and the test heads are configured to be unloaded from the inspection region to the maintenance region.

Wafer inspection system

A wafer inspection system is provided. The wafer inspection system comprises: a transfer region in which a transfer device is arranged; an inspection region in which test heads for inspecting a substrate are arranged; and a maintenance region in which the test heads are maintained. The inspection region is located between the transfer region and the maintenance region, a plurality of inspection rooms accommodating the test heads are adjacent to each other in the inspection region, and the test heads are configured to be unloaded from the inspection region to the maintenance region.

Wafer inspection system, wafer inspection apparatus and prober

Test head and wafer inspection apparatus

A maintenance carriage of a wafer inspection apparatus can easily unload a test head. A wafer inspection apparatusincludes a cell towerin which cellsare arranged at four levels, and each of the cellsaccommodates a test head. At an outside of the cell tower, a maintenance carriageis arranged. The maintenance carriageincludes a carriage baseconfigured to be moved through rollers; a test head caseconfigured to accommodate the test head; a lift deviceprovided uprightly from the carriage baseand configured to move up and down the test head case; and a horizontal position adjusting stageprovided between a lifterof the lift deviceand the test head caseand configured to move the test head casehorizontally with respect to the lifter

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Nirasaki, Japan

Tadayoshi Hosaka