Hitachi, Ltd.

Hitachi Service Engineering Co., Ltd.

Nippon Telegraph and Telephone Corporation

Nippon Telephone and Telegraph Corporation

Hitachi Service Engineering, Ltd.

Hitachi Engineering Co., Ltd.

Hitachi Engineering Services Co., Ltd.

Service Engineering Co. Ltd.

Tadasi Sonobe

Takuya Fukuda

Manabu Matsumoto

Takashi Ikeguchi

Teruhiro Takizawa

Fumio Suzuki

Ken Yoshioka

Masayuki Shibata

Kazuo Suzuki

Michio Ohue

Hideshi Fukumoto

Shinjiroo Ueda

Toru Murashita

Satoshi Ido

Kazuo Kuroishi

Shigeru Takahashi

Naohiro Momma

Shinjiro Ueda

Naoki Maki

Yasuhiro Mochizuki

Toshiaki Kobari

Akinori Shibayama

Toshio Saitoh

Noboru Suzuki

Shigeru Sakamoto

Yoko Kameoka

Takashi Kobayashi

Sueo Kawai

Katsuaki Saito

Yukio Ishigaki

Saburo Usami

Shunji Kakiuchi

Mamoru Katane

Toshio Hattori

Hiroshi Aoyama

Takao Takahashi

Tosuke Hirata

Yoshiaki Kazawa

Fumihiko Goto

Kiyoshi Chiba

Yumiko Seki

Naoki Kasahara

Toshio Ishizuki

Shizuo Tsujimoto

Kazuo Kuroichi

Kiyosi Chiba

Toa Hayasaka

Toyoki Kitayama

A superconducting magnet abnormality detection and protection apparatus is for early and surely detecting abnormality in superconducting coils mounted on a vehicle and protecting the superconducting coils. Magnetic flux detecting devices are mounted inside an outer vessel, which is a vacuum container of a superconducting magnet, so as to be opposite to the superconducting coil. Voltages induced in the magnetic flux detecting devices are detected. Voltage signals are led to a decision device. By monitoring the change of the voltage signals with time in a comparing judgment device, it is determined whether there is an abnormality. If there is an abnormality, an alarm indicator informs of an abnormal state, and a protection device takes protection measures such as interruption of the current of the superconducting magnet. Owing to such configuration, heat does not penetrate from the outside into the superconducting coil via instrumentation lead wires of the magnetic flux detecting devices. Magnitudes of vibration and displacement of the superconducting coil can be detected without contacting the superconducting coil. By always monitoring these signals, it becomes possible to early detect an abnormality in the superconducting coil and protect it.

Superconducting magnet abnormality detection and protection apparatus

A plasma treatment apparatus for forming a thin film on a substrate in a vacuum vessel includes a magnetic field generator which can be positioned inside or outside the vacuum vessel, and a microwave source. The magnetic field strength is controllable such that an electron cyclotron resonance (ECR) area is defined near the substrate. The magnetic field generator can be arranged so that plasma and reactive gas introduction ports are on the microwave introduction side of the ECR area and the substrate is on the opposite side of the ECR area. Alternatively, a gas introduction port can be positioned such that reactive gas is introduced into the ECR area or onto the substrate.

Apparatus for plasma treatment using electron cyclotron resonance

A beam member which is installed at diametral portion in a ring shape superconducting coil container for supporting hoop stress of the coil, or a portion of radiant heat shield covering the beam member, is partly or entirely composed of electrical insulators or high resistivity materials. In accordance with the above composition, eddy current which is generated in the coil container when the superconducting coil container crosses magnetic field caused by eddy current which is generated in the radiant heat shield when the radiant heat shield crosses strong magnetic field caused by the superconducting coils with relative vibration of the radiant heat shield to the superconducting coil by a dynamic cause can be suppressed. Accordingly, heat generation in the superconducting coil container can be reduced, and consequently, generation of quenching can be prevented.

Superconducting magnet

A superconducting magnet includes a superconducting coil, an inner tank for containing the coil, a shield plate for covering the inner tank, and an outer tank for accommodating the superconducting coil, the inner tank and the shield plate. The inner tank is supported on the outer tank by a load support member and the outer tank forms a vacuum vessel. At least one of the inner tank, the load support member, the shield plate and the outer tank includes a detection arrangement for detecting abnormality and/or deterioration of the inner tank, load support member, shield plate and outer tank associated with the respective detection arrangement.

Superconducting magnet magnetically levitated transportation apparatus

There is disclosed a coil structure which can be rapidly energized or excited, and which reduces the generation of heat in a coil container by an eddy current due to a dynamic disturbance such as vibration and a magnetic field fluctuation, thereby suppressing the occurrence a quench. The coil container is constituted by a low-resistivity material, and a high-resistivity portion is provided at at least one portion of the coil container in the direction of the periphery of the coil container. The high-resistivity portion is provided at a position where a vibration displacement is small or a magnetic field fluctuation is small. When the coil structure is to be energized or excited, the eddy current produced in the direction of the periphery of the superconducting-coil container can be reduced at the high-resistivity portion, and when the dynamic disturbance develops, the generation of heat by the eddy current is suppressed by the low-resistivity material.

Coil structure and coil container

A levitation system of a magnetically levitated train is provided wherein superconducting magnets are installed in a car body, and the first layer and the second layer of levitation coils are so arranged as to be in a shifted location relative to each other in the moving direction of the train. By making the levitation coils two layers and by arranging the two layers in the shifted location relative to each other in the moving direction, amplitude of higher harmonic waves is reduced to a very small level, substantially to zero.

Levitation system of a magnetically levitated train

A plasma processing apparatus performs a sample processing and cleaning processing. The sample processing is carried out by generating a reaction gas plasma within a vacuum vessel of the apparatus using an electron cyclotron resonance excitation. The cleaning processing is carried out to clean the inner wall of the vacuum vessel by generating a cleaning gas plasma within the vacuum vessel. Generation of the cleaning gas plasma takes place by using either one of the following processes:

Plasma processing apparatus and the method of the same

In a plasma processing apparatus using ECR, faces in contact with plasma excepting a substance to be processed are covered by an insulating material. By such configuration, discharge caused between the plasma and the substance to be processed in plasma processing is prevented beforehand.

Plasma processing method and apparatus using electron cyclotron resonance

An industrial compact synchrotron radiation source includes, for the purpose of prolonging lifetime of a charged particle beam, beam absorbers made of a material having a low photodesorption yield and disposed inside a bending section/vacuum chamber at at least positions upon which the synchrotron radiation is irradiated, and electrically conductive beam stabilizers disposed at positions inside the bending section/vacuum chamber which are distant by a predetermined distance from an orbit of the charged particle beam toward the outer circumferential wall of the bending section/vacuum chamber.

Synchrotron radiation source with beam stabilizers

The present invention relates to a plasma treatment apparatus for making plasma surface processing of a specimen such as thin-film formation, etching, sputtering or plasma oxidation by use of plasma produced through microwave discharge. In a specimen chamber provided with a specimen table for holding at least one specimen thereon, a microwave is introduced from a direction intersecting a magnetic line of force so as to propagate in the longitudinal direction of an ECR region or in a direction along the plane of the ECR region. Since the microwave is introduced from the transverse direction of the specimen chamber, the provision of a microwave introducing window at an upper portion of the specimen chamber is not required and hence a counter electrode for applying an electric field to the specimen can be disposed at the upper portion of the specimen chamber, thereby making it possible to apply a uniform electric field to the specimen so that the specimen is subjected to a uniform treatment.

Microwave-excited plasma processing apparatus

Synchrotron radiation is generated when a base of charged particles is bent by a bending magnet. The synchrotron radiation passes down a lead-out duct as the total number of pumps is limited by the size of the apparatus and many pumps are needed in order to achieve a good vacuum. An ion pump has a main magnetic field, normally generated by a magnet of the ion pump which controls the behavior of the electrons in the ion pump. However, the leakage magnetic field of the bending magnet affects the ion pump, and therefore the ion pump is arranged so that its main magnetic field is aligned with the leakage magnetic field at the ion pump, or at least with a main component thereof. In this way, the effect of the leakage magnetic field on the ion pump is reduced. Indeed, it is possible to use the leakage magnetic field as the main magnetic field of the ion pump.

Synchrotron radiation generation apparatus

Synchrotron radiation source

A synchrotron radiation source and a method of making the same. As assembly of a beam absorber for absorbing synchrotron radiation beams and a piping for cooling the beam absorber is mounted in a charged particle beam duct of a bending section of the synchrotron radiation source for bending a charged particle beam. Fixed to at least one straight duct that is connectable to either of the opposite ends of the charged particle beam duch is a piping guide duct through which the beam absorber cooling piping is drawn to the outside, so that the assembly of the beam absorber and the beam absorber cooling piping can readily be mounted in the synchrotron radiation source.

Synchrotron radiation source and method of making the same

A superconducting energy storage device for storing electric power in superconducting magnets in the form of magnetic energy. The superconducting magnets are include a superconducting toroidal magnet and a superconducting solenoid magnet arranged to be inscribed in the inside of the superconducting toroidal magnet, the magnets being connected electrically in series to each other. Further, the superconducting magnets include a plurality of units, each of which is formed as a combination of the aforementioned toroidal and solenoid superconducting magnets, the units being piled up in the axial direction of the superconducting solenoid magnet. In the thus arranged device, electromagnetic force generated in the superconducting magnets can be supported without the necessity of firm bed rock, thereby eliminating the limitation in conditions of location of the energy storage device. Further, the plurality of energy storage units can be arranged effectively so that space can be saved.

Superconducting energy storage device

A plasma operation apparatus utilizes plasma generated by a microwave cooperative with a magnetic field as to perform a surface operation on a specimen such as semiconductor substrates, such as, for example, thin film deposition, etching, sputtering and plasma oxidation. The apparatus particularly takes advantage of electron cyclotron resonance and is suitable for performing highly efficient and high-quality plasma operations.

Plasma operation apparatus

Growing community of inventors

Iwaki, Japan

Tadasi Sonobe