Mitsubishi Denki Kabushiki Kaisha

Renesas Electronics Corporation

Tadashi Omae

Satoshi Shimizu

Takesada Akiba

Yasushi Oka

Shinichi Kobayashi

Masashi Wada

Akinori Matsuo

Shinji Kawai

Jun Sumino

Kenji Kozakai

Makoto Oi

Ippei Shimizu

The chip area of a semiconductor device including a nonvolatile memory is reduced. The semiconductor device includes a first memory cell and a second memory cell which are formed on the principal surface of a substrate, and arranged adjacent to each other. In a principal surface of the substrate, active regions which are electrically isolated from each other are arranged. In the first active region, the capacitor element of the first memory cell is arranged, while the capacitor element of the second memory cell is arranged in the fourth active region. In the second active region, the respective write/erase elements of the first and second memory cells are both arranged. Further, in the third active region, the respective read elements of the first and second memory cells are both arranged.

Semiconductor device

A process for manufacturing a semiconductor device includes the following steps applied to a semiconductor substrate having, on its main surface, a plurality of separation oxide films, formed in stripes parallel to each other, and gate oxide films formed in the regions placed between separation oxide films, wherein pieces of a polysilicon layer are formed so as to extend from areas above gate oxide films to areas above portions of separation oxide films on both sides of the gate oxide films and wherein a first resist is formed so as to cover the top surfaces of polysilicon layer: the injection step of injecting an impurity into polysilicon layer above separation oxide films; and the thermal diffusion step of carrying out a heat processing so that the injected impurity diffuses to the regions above gate oxide films within polysilicon layer.

Semiconductor device and process for manufacturing same

The invention provides a semiconductor device having a multilayer wiring structure in which a plurality of layers are provided on a substrate and in which a connection wiring is formed on each layer, wherein a dummy pattern almost as high as the connection wiring is provided in a predetermined region of each layer so that an outer peripheral portion of the dummy pattern is adjacent to the connection wiring, the dummy pattern is formed linearly at least on the outer peripheral portion, and a distance between a linearly formed portion and a portion inside of the linearly formed portion is set to be equal to or narrower than a distance between the connection wiring and the linearly formed portion.

The inventive DINOR flash memory includes a plurality of blocks, a spare block and a spare word line block, which are formed on a plurality of electrically isolated P-type wells. When a word line-to-well short-circuit takes place in a certain block and another block is selected, the block causing the word line-to-well short-circuit is brought into a non-selected state. Thus, no leakage takes place in the block causing the word line-to-well short-circuit, to exert no bad influence on the selected block.

Nonvolatile semiconductor memory device having a plurality of blocks

Growing community of inventors

Tokyo, Japan

Tadashi Omae