Femto Deployments Inc.

Cyber Laser Inc.

Photo-physics Laboratory Inc.

Tadashi Okuno

Akira Watanabe

Takeji Ueda

Hitoshi Sekita

Tetsumi Sumiyoshi

Hiroshi Tsugita

A terahertz-wave signal input unitconfigured to input a terahertz-wave signal from a spectroscopic apparatusfor detecting a terahertz wave acting on a photoresist, and a terahertz-wave signal analysis unitconfigured to analyze a terahertz-wave signal input by the terahertz-wave signal input unitto acquire characteristic information of the photoresist are included, and spectroscopic processing using a terahertz wave is performed on a photoresist to acquire characteristic information of the photoresist (a characteristic value or a correlation characteristic indicating a relationship between a plurality of elements including the characteristic value). Even though the characteristics of the photoresist change depending on the light, since the characteristic change is not caused by the terahertz wave, it is possible to acquire characteristic information of the photoresist without changing the characteristics of the photoresist, and to properly evaluate the characteristics of the photoresist from the characteristic information.

Photoresist characteristics analysis method and characteristics analysis device

The invention is configured to include a spectroscopy cellas a container including one or more spaces, each of which has a plate shape and contains a to-be-measured object that transmits or reflects a terahertz wave; and a holderincluding one or more first holder through-holesanddisposed at positions corresponding to the spaces of the spectroscopy cell, each of the spaces containing the to-be-measured object. A body portionof the spectroscopy cellis made of a resin material that transmits the terahertz wave, and the spectroscopy cellis loaded into the holderand is used. The holderhas a function of holding the spectroscopy cell, and a function of correcting one or more of a distortion, a twist, and a bending of the spectroscopy cell

Measuring jig, and calibration method and terahertz wave measuring method using same

An electromagnetic signal analysis apparatus includes a frequency spectrum obtaining unitto obtain a frequency spectrum that is generated based on an electromagnetic signal obtained by a spectral deviceand represents a property value with respect to a frequency, a water vapor fitting processing unitto fit a waveform of a single fitting function or a composite waveform, of a plurality of fitting functions to a frequency spectrum at a frequency at which absorption of the electromagnetic waves by water vapor is increased, and a property analyzing unitto analyze a property of a liquid sample using at least two values that determine a characteristic of the fitting function used for the fitting, so that the frequency spectrum, at the frequency at which absorption of the electromagnetic waves by water vapor generated from surfaces of the liquid sample is increased is processed to analyze the property of the liquid sample.

Electromagnetic signal analysis apparatus and electromagnetic signal analysis program

A terahertz wave signal analysis device includes a fitting processing unitthat fits synthetic waveforms of a plurality of normal distribution functions which differ in at least one of a center frequency, an amplitude, and a width to a frequency spectrum obtained from a terahertz wave signal and a graph generating unitthat generates a graph using at least one of a center frequency, an amplitude, and a width of a plurality of normal distribution functions used in the fitting as parameters, and it is possible to visualize a feature corresponding to a characteristic of a sample in the form of a graph in an easy-to-understand manner by approximating a frequency spectrum which does not clearly appear because a difference in the characteristic of the sample becomes a feature of a waveform by synthetic waveforms of a plurality of normal distribution functions in a form in which the characteristic of the sample is taken over and generating a graph on the basis of parameters of a plurality of normal distribution functions used in the approximation.

Terahertz wave signal analysis device, terahertz wave signal analysis method, and terahertz wave signal analysis program

A terahertz wave is spectrally dispersed into two waves which are caused to pass through a sample liquid filmand a reference liquid filmand are then collected, and the terahertz waves in an interference state are detected by a terahertz wave detecting semiconductorConsequently, only spectroscopic information related to a distinctive characteristic of the sample liquid filmis detected. In addition, a predetermined optical path length difference is provided between a path where the terahertz wave is transmitted through the sample liquid filmand a path where the terahertz wave is transmitted through the reference liquid filmby an optical delaying unitIna frequency spectrum obtained by performing Fourier transformation over a terahertz wave signal having an interference waveform by a terahertz wave signal analyzing deviceconsequently, a feature caused by an interaction of dissimilar molecules in the sample liquid filmappears in a spectral intensity at a frequency depending on the optical path length difference.

Terahertz time domain spectroscopic apparatus

There are provided a terahertz wave spectral dispersing unitfor spectrally dispersing a terahertz wave to be generated from a terahertz wave generating semiconductorinto two waves, a terahertz wave focusing unitfor focusing a terahertz wave transmitted through a sample liquid filmand a terahertz wave transmitted through a reference liquid film, and a terahertz wave detecting semiconductorfor detecting the focused terahertz wave, and it is possible to detect the terahertz wave transmitted through the sample liquid filmand the terahertz wave transmitted through the reference liquid filmin an interference state, thereby offsetting a noise made by a stripe-shaped wave generated on the sample liquid filmand a noise made by a stripe-shaped wave generated on the reference liquid film

Terahertz time domain spectroscopy device

A problem diagnosis method and problem repair method for a laser device are provided. The method includes measuring the intensity of scattered light generated by an optical part inside the laser device; referring to data indicating a temporal change in the scattered light predicted under predetermined operating conditions of the laser device, and predicting the seriousness of the problem from the intensity of scattered light; and determining what kind of maintenance work is necessary based on the seriousness of the problem. Additionally, the seriousness of the problem in the optical part can be predicted by executing fuzzy logic based on membership functions defining the relationship between scattered light intensity and the seriousness of problems of optical parts.

Problem diagnosis method and problem repair method for laser device

The energy conversion efficiency from light that is to be converted to converted light of a wavelength conversion device is adjusted so as always to be kept stably at a maximum. The wavelength conversion device is provided with a laser light sourcefor generating a fundamental wave light, a nonlinear optical crystalinto which the fundamental wave light is made to enter to generate converted light, and an optical path adjusting portionfor adjusting the direction of propagation of the fundamental wave light and the position of the light beam of the fundamental wave light in order to make the fundamental wave light enter the nonlinear optical crystalwhile satisfying phase matching conditions. The optical path adjusting portionis constituted so as to be provided with a first reflecting mirrorand a second reflecting mirrorand the first reflecting mirror is provided with adjustment means driven by motors Mand Mand the second reflecting mirror is provided with adjustment means driven by motors Mand MAdditionally, the wavelength conversion device is provided with a semi-transparent mirrorfor splitting off and taking out one portion of output lightand a photodetectorfor detecting this split off output light. An electrical signalthat is output from the photodetectoris input into an adjustment value calculating meansand in this adjustment value calculating means, the necessary adjustment values for the adjustment means in the optical path adjusting portionare calculated using fuzzy inference, and this result is output to an optical path adjusting portion control deviceThe optical path adjusting portion control devicecarries out adjustment of the optical path based upon output signalsfrom the adjustment value calculating means

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Okayama, Japan

Tadashi Okuno