Hitachi, Ltd.

Tadashi Ohtaka

Hideo Todokoro

Katsuhiro Kuroda

Toshihiko Wada

Kimio Kanda

Yasushi Nakaizumi

Nobuyoshi Hashimoto

Measurement scanner for semi-conductor

A scanning electron microscope is provided with a channel cylinder between a sample and an electron source. The channel cylinder generates a deceleration electrical field to decelerate an electron beam emitted from the electron source. The channel cylinder has a portion having an electron source side and sample side. A detector is provided on the electron source side and sample channel cylinder portion. The detector detects the secondary signal emitted from the sample, so that a scan image is obtained with a high spatial resolution.

Scanning electron microscope and method for controlling a scanning

An electron microscope eliminates external ducting for evacuation by interlinking the interiors of a sample chamber for a sample, a casing for electron lenses and a chamber for an electron gun. Those interiors form a closed space with an evacuation path extending therethrough and are evacuated by evacuation means a vacuum pump connected to the sample chamber. The electron lenses are contained within sealed modules and the evacuation path passes between the sides of those modules and the internal walls of the casing. The resulting structure may be enclosed in substantially unbroken magnetic shielding.

Electron microscope

An objective lens of an electron beam apparatus in which an electron beam emitted from an electron gun is converged onto a specimen, the reflected electron from the specimen or the secondary electron emitted therefrom is detected, and a fine pattern on the specimen is measured, comprises: a magnetic circuit consisting of an upper magnetic pole member having an opening adapted to transmit the electron beam to be converted which was emitted from the electron gun, a lower magnetic pole member provided so as to face the upper magnetic pole member, and a magnetic path member to connect the outer peripheral edges of the upper and lower magnetic pole members; a coil, provided for a part of the magnetic circuit, for generating the magnetic fluxes passing through the upper and lower magnetic pole members, the magnetic path member, and the space between the opening edge and the lower magnetic pole member when this coil is excited; and a moving apparatus which is disposed on the surface of the lower magnetic pole member opposite to the upper magnetic pole member and is movable on the plane perpendicular to the electron beam in the magnetic circuit in the state in which the specimen is put on the upper surface of the moving apparatus.

Objective lens of an electron beam apparatus

A feed screw is provided in a specimen-exchanging chamber connecting with a specimen chamber valve and a removable element is removed in the axial direction of the feed screw by rotation of the feed screw. The removal of the removable element makes it possible to remove a specimen holder between the specimen chamber and the specimen-exchanging chamber. It is possible to load and unload the specimen holder with the removable element. Thus, while leaving the specimen holder in the specimen chamber, only the removable element can be removed to the specimen-exchanging chamber.

Specimen-exchanging apparatus

Secondary electron detecting apparatus

An apparatus is disclosed for facilitating adjustments of an image of a specimen obtained from an electron microscope and displayed on a cathode ray tube by displaying additionally and concurrently a wave form indicating information representative of contrast, focus, brightness or the like parameters of said image of the specimen. To this end, an electric specimen information signal is derived and applied alternatively to the Y-axis deflection coil and grid electrode of the display cathode ray tube (CRT) in response to a scanning line of the CRT in the direction of the X-axis thereof.

Growing community of inventors

Katsuta, Japan

Tadashi Ohtaka