Sanyo Electric Co., Ltd.

Sanyo Semiconductor Co., Ltd.

Tadashi Natsume

Hiroyasu Ishida

Tadaaki Souma

Since VF and IR characteristics of a Schottky barrier diode are in a trade-off relationship, there has heretofore been a problem that an increase in a leak current is unavoidable in order to realize a low VF. Moreover, there has been a known structure which suppresses the leak current in such a manner that a depletion layer is spread by providing P+ regions and a pinch-off effect is utilized. However, in reality, it is difficult to completely pinch off the depletion layer. P+ type regions are provided, and a low VF Schottky metal layer is allowed to come into contact with the P+ type regions and depletion regions therearound. A low IR Schottky metal layer is allowed to come into contact with a surface of a N type substrate between the depletion regions. When a forward bias is applied, a current flows through the metal layer of low VF characteristic. When a reverse bias is applied, a current path narrowed by the depletion regions is formed only in the metal layer portion of low IR characteristic. Thus, a low VF and low IR Schottky barrier diode can be realized.

Semiconductor device and manufacturing method thereof

Provided is an insulated gate semiconductor device. In the device, source regions are provided in the entire operation area and a first back gate region is provided below the source region between trenches. Moreover, a second back gate region connected to the first back gate region is provided outside of the source regions. Thereafter, a first electrode layer coming into contact with the source regions is provided in the entire operation area, and a second electrode layer coming into contact with the second back gate regions is provided around the first electrode layer. Accordingly, potentials can be individually applied to the first electrode layer and the second electrode layer. Thus, it is possible to perform control for preventing reverse flow caused by a parasitic diode.

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Oura-gun, Japan

Tadashi Natsume