Kabushiki Kaisha Kobe Seiko Sho

Kobe Steel, Ltd.

Tadashi Kumakiri

Jun Munemasa

Hirofumi Fujii

Tatsuya Tanaka

Katuhiko Shimojima

Noriyuki Inuishi

Kouichirou Akari

The present invention provides a film deposition system capable of effectively cooling a work having a large volume, and a film deposition method using this system. The film deposition system has, within a vacuum chamber, an evaporation sourcefor forming a film on a workand a cooling devicefor cooling the work, characterized in that the workhas an internal spacecommunicating with the outside through an opening part, and the cooling deviceis insertable to and drawable from the internal spacethrough the opening partof the workto cool the workfrom the inside.

Film deposition system and film deposition method using the same

An ion implantation apparatus is intended to perform the ion implantation for the desired surface of a target irrespective of the surface geometry thereof, and to simplify the structure. The apparatus includes a vacuum chamber, and a plurality of arc ion sources for emitting ion beams on the surface of the target disposed within the vacuum chamber. A plurality of arc ion source mounting openings are formed on the vacuum chamber. One or more of arc ion sources necessary for emitting ion beams on the desired surface of the target are airtightly mounted on the openings opposed to the above surface.

Ion implantation apparatus

A cathodic arc deposition system includes a cathode made of a film forming material, a shield surrounding a circumferential side of the cathode with a gap, a vacuum chamber having the cathode and the shield therein, and a substrate to have deposited at a surface thereof an ionized film forming material by generating an arc discharge between the cathode and the anode. Either the cathode or the shield is adjusted in height so as to keep the upper edge of the shield at substantially the same vertical level as the upper edge of the cathode.

Cathodic arc deposition system

Growing community of inventors

Takasago, Japan

Tadashi Kumakiri