Canon Kabushiki Kaisha

Tadashi Kimura

Nobushige Korenaga

Hideo Saito

Hiroatsu Kondo

Akira Morohashi

This disclosure provides a lithography apparatus including: a lens barrel having an optical system configured to irradiate a substrate with a beam; and a stage apparatus configured to repeat a long distance movement in a primary scanning direction of the substrate and a short distance movement which is shorter than the long distance movement in terms of the amount of movement in a secondary scanning direction of the substrate, and being configured to form a pattern on the substrate with the beam, wherein the stage apparatus includes: a first moving body configured to move in the primary scanning direction; a floating unit configured to support the first moving body, so as to float by a magnetic force and be movable in the primary scanning direction; a second moving body configured to move in the secondary scanning direction; and a guide using a rolling body configured to support the second moving body in contact therewith so as to be movable in the secondary scanning direction.

Lithography apparatus, stage apparatus, and method of manufacturing articles

A stage apparatus has a base; a movable portion including a stage movable relative to the base; a flexible utility line for supplying utility to the movable portion; and a cover for covering the utility line, the cover including: a housing member provided to one of the base and the movable portion, in which an opening is formed; and a sealing member provided to the other of the base and the movable portion, which is arranged opposite to a side, in which the opening is formed, of the housing member with a gap therebetween, and has a side for sealing the opening.

Stage apparatus with flexible utility line, lithography apparatus, and article manufacturing method

In an electric conference system using a large-screen display, presentation in an environment with a plurality of portable terminals connected is not taken into consideration. To do this, a host computer for an electric conference system is arranged to store a member ID to specify a terminal, generate a password, display the generated password on a large-screen display and make the password open to participants of a conference, authenticate the terminal on the basis of a member ID and a password, which are contained in a connection request received from the terminal, and process a command received from the terminal on the basis of the authentication result.

Electric conference system and control method thereof

A printer of the automatically interchangeable character wheel type includes a platen formed lengthwise of the printer to support one surface of a printing sheet, and a carriage guided so as to be reciprocally movable along the platen. The carriage carries thereon contain a housing for containing a character wheel therein, a first shift device for shifting the character wheel in the containing housing to a printing position, a printing hammer for impacting the characters of the character wheel in the printing position, and a second shift device for shifting an ink ribbon to a first position for printing and a second position for standby by the same motor that drives the first shaft device.

Growing community of inventors

Chikusei, Japan

Tadashi Kimura