Keyence Corporation

Tadashi Hashimoto

Koji Takahashi

Tsukasa Fujita

Masayasu Ikebuchi

Takashi Naruse

Kengo Yanase

Michio Osaki

Ko Endo

The image measurement apparatus searches for a workpiece by performing a first stage operation. The image measurement apparatus generates an image in each imaging field-of-view while moving the stage according to a predetermined sequence, and determines whether or not the workpiece is included in each image. When the workpiece is found, the image measurement apparatus switches from the first stage operation to a second stage operation. The image measurement apparatus generates an image in one or more imaging field-of-views located in a direction in which the workpiece extends, among a plurality of imaging field-of-views located around the imaging field-of-view on the stage, in which the image has been obtained. The image measurement apparatus joins a plurality of images generated in the second stage operation to generate a joined image including the whole workpiece, and displays the joined image.

Image measurement apparatus

In a setting mode, a processor stores in a memory a reference image and reference imaging position information indicating an imaging position of the reference image. In a measurement mode, the processor drives at least one of a table and an imaging section by a driving section according to the reference imaging position information stored in the memory to move an imaging position of the imaging section to the imaging position of the reference image and execute a pattern search.

Image measuring apparatus

Provided is an optical coordinate measuring device with improved measurement efficiency. A holding part of a measurement head includes an installation part and a stand part. The installation part has a horizontal flat shape and is installed on the installation surface. The stand part is provided so as to extend upward from one end of the installation part. The placement table is provided at the other end of the installation part. A measurement target is placed on the placement table. A main imaging unit is provided on an upper part of the stand part. The main imaging unit is arranged so as to be turned obliquely downward such that it can capture an image of a previously set imaging region above the placement table.

Optical coordinate measuring device

There is provided a static eliminator for accurately detecting a contamination condition of a discharge electrode, in which a target value as a target frame ground current value is changed from, for example, zero as a reference alternately to the plus side and the minus side to such a degree as not to affect the ion balance of a workpiece, and the follow-up time, namely a phase delay, with respect to the change in target value differs depending on the contamination condition of the discharge electrode, and becomes longer with the progress of the contamination, and by use of this characteristic, a plurality of thresholds are prepared and compared with a detected frame ground current value, so as to detect the contamination condition of the discharge electrode.

Static eliminator

The present invention relates to suppressing wear and contamination of the electrode needle as well as effectively removing the electricity from a charged body. An electricity removal mode in which the electrode needle is applied with a high voltage to produce ions and a halt mode in which the electrode needle is halted are provided, that are alternatively selected based on a selection of a user. The halt mode includes a halt period during which the high voltage is not basically applied on the electrode needle. When a self discharge occurs by approach of a charged body in this halt period and an absolute value of current that flows through the resistance exceeds the first threshold value, the electricity removal operation is initiated in which the high voltage is applied on the electrode needle to produce ions. Subsequently, after a predetermined time period passes, for example, the electricity removal operation is terminated and the halt period is resumed.

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Osaka, Japan

Tadashi Hashimoto