Canon Kabushiki Kaisha

Kabushiki Kaisha Toshiba

Tadashi Aoki

Aoji Isono

Kazuhiko Murayama

Kenji Shino

Yasuhiko Sano

Kazunori Katakura

Hiroshi Tanaka

Tsutomu Sakamoto

Yoshinori Makita

Hiroshi Isoyama

Ken Katsukura

The present invention provides a lithography apparatus for forming a pattern on a substrate, including a motor configured to drive a table for holding the substrate in accordance with a driving profile, a setting unit configured to set one of a normal mode and a power saving mode as an operation mode of the motor, and a controller configured to change the driving profile when the power saving mode is set, such that an amount of generated heat of the motor caused by driving of the table is smaller than that in the normal mode, and the number of substrates to be processed by the lithography apparatus per unit time is satisfied.

Lithography apparatus and method of manufacturing article

A scanning circuit and an image display device in which the influence of losses in a signal path to scanning wiring and a scanning signal output circuit can be reduced. By considering matrix drive in which one row is driven at a time and two or more of the rows are not simultaneously driven, the 480 rows are divided into six modules and one feedback circuit is provided in correspondence with each module to perform feedback control of the output buffers corresponding to 80 rows. An output from a switch is amplified by an operational amplifier and is input as a compensation signal to all the output buffers by an output voltage compensation circuit. Compensation for a voltage drop is made by using the compensation signal for an increase in voltage such that the apparent voltage drop due to the output current is limited to a small value.

Scanning circuit and image display device

The present invention discloses an invention about a drive waveform for driving an image display unit. In particular, the present invention discloses the structure of using as a drive waveform a drive waveform signal which is level controlled by a plural of discontinuous levels including a minimum level which is a level corresponding to luminance brightness gradation data which is not 0, at least one non-minimum level which is a level corresponding to larger luminance brightness gradation data, and an intermediate level between the above-described minimum level and the above-described non-minimum level, and is given pulse width control with discontinuous pulse width, and which has a portion, which is controlled with the above-described minimum level, in its trailing edge, and a portion, which is controlled with the above-described intermediate level just before the former portion, when it has the portion controlled by the above-described non-minimum level.

Drive circuit, display device, and driving method

The present invention can provide a driving apparatus capable of compensating an influence of a voltage drop at low costs in a simple manner, which includes: a column driver circuit that generates at least one of modulation signals different in start reference time in one horizontal scanning period and the modulation signals obtained by using pulse width modulation and voltage amplitude modulation in combination; and a correction circuit that corrects a voltage of the row selection signal so as to suppress a voltage variation of the row selection signal, which is caused due to at least a resistance of an output stage of the row driver circuit and a current caused to flow into the resistance.

Driving apparatus, driver circuit, and image display apparatus

An image display apparatus having a plurality of image forming devices. In an output circuit provided between constant voltage supplies and wiring for driving each of the image forming devices, MOSFETs are successively turned on from the one having a higher ON resistance at the time of switching to make a stepwise transition between outputs from the constant voltage supplies, and have steady potential, thereby limiting undesirable variation in signal potential at the time of switching.

Image display apparatus

A modulator includes a modulation circuit for generating modulation signals based on inputted luminance data and for outputting the modulation signals to a plurality of image display elements, each of which is driven by a potential difference between a selection potential applied within a predetermined time period by a selection circuit and the modulation signal. The modulation signal has a waveform which is a combination of a plurality of unit pulses, with the unit pulses having an identical width and n kinds of peak values A1 to An, with n being an integer greater than 1, and A1&#x3c;. . . &#x3c;An. Additionally, the unit pulses are combined in such a way that maximal peak value portions of the waveform of the modulation signal are dispersed, and that a rising portion and a falling portion of the waveform have a stair-step-like shape.

Driving device and image display apparatus

A drive waveform signal which is level controlled by discontinuous levels including a minimum level corresponding to luminance brightness gradation data which is not 0, at least one non-minimum level corresponding to larger luminance brightness gradation data, and an intermediate level between the minimum and non-minimum level. The signal, which is employed to drive an image display unit, is given pulse width control with discontinuous pulse width, and has a portion, controlled with the minimum level, in its trailing edge, and a portion, controlled with the intermediate level just before the former portion, when it has the portion controlled by the non-minimum level.

A driver IC (integrated circuit) for a display device allowing simple designing and production and yet capable of obviating display quality difference is provided. The driver IC includes a plurality of drive signal output terminals arrange to have variable drive capacities which vary depending on loads of respective signal electrodes of the display device to which the output terminals are connected so as to supply the respective signal electrodes of the display device with drive signal waveforms having identical time constant. The driver IC preferably includes a number of juxtaposed transistors corresponding to but larger in number than the drive signal output terminals, wherein the respective drive signal output terminals are connected to prescribed numbers of transistors so as to have different drive capacities depending on loads of the signal electrodes of the display device to which the output terminals are connected.

Display device driver IC

A drive signal generation circuit which performs gradation control on a load by a drive signal having a stepped waveform. In a case where the wave height value corresponding to input gradation data is Vm (2&#x2266;m&#x2266;n), the drive signal is caused to rise in such a manner that each output Vk (2&#x2266;k&#x2266;m) is produced one slot after the output V(k&#x2212;1) to increase the wave height value V(reference potential) to Vm in a stepping manner. One slot corresponds to a unit time of the pulse width modulation. The drive signal is caused to fall in such a manner that each output V(k&#x2212;1) (1&#x2266;k&#x2266;m&#x2212;1) is produced one or two slots after the output Vk to reduce the wave height value from Vm to off level in a stepping manner. A delay circuit is used to delay signals slot by slot. A selection is made from delayed signals according to luminance data to determine a waveform. The circuit is also designed to enable the drive signal waveform rise position to be changed.

Drive signal generator and image display apparatus

A display apparatus, such as a liquid crystal display apparatus, is constituted by: a display unit including electrodes arranged in a matrix form, a circuit for generating a signal waveform applied to the electrodes of the display unit, and a low-pass filter for removing a frequency component exceeding a prescribed frequency from the signal waveform to inlet ends of the electrodes in the display unit. As a result, the occurrence of a large transient current liable to flow at pixels close to inlet ends of the display unit can be suppressed. The removal of such a high-frequency component may also be performed by superposing split pulses with a resin and a falling portion of a drive signal waveform and by integrating the superposed drive signal waveform.

Display apparatus

There is provided method and apparatus for recording a waveform. By counting the intervals of change points of a recorded waveform and recording the count data, the waveform can be recorded for a long time.

Growing community of inventors

Kanagawa, Japan

Tadashi Aoki