Kabushiki Kaisha Shinkawa

Tadashi Akiike

Mitsuaki Sakakura

Minoru Kawagishi

Ryuichi Kyomasu

Yoshimitsu Terakado

Takatoshi Kawamura

A spool holder structure used in, for instance, a bonding apparatus and equipped with a spool holder that holds a spool around which a wire is wound, a holder shaft which is fastened to the inner circumference of the spool holder, a holder fastening shaft made of an insulating material and fastened to the inner circumference of the holder shaft, and a motor that has an output shaft fastened to the holder fastening shaft, in which the holder shaft is fastened to an attachment plate of, for instance, the bonding apparatus via a conductive bearing so that the holder shaft is rotatable, and the conductive bearing is grounded.

Spool holder structure for a wire bonder

An ultrasonic horn that has a capillary attachment hole to hold a capillary therein so as to be used in wire bonding, including a perpendicular slit provided on the opposite side of the capillary attachment hole from the tip end of the ultrasonic horn. An area surrounding the capillary attachment hole is formed thin, and the slit is narrowed and tightened by a bolt so as to insure a stable capillary holding force and prevent deterioration in the holding force over time.

Capillary holding structure for ultrasonic horn

An ultrasonic horn used in, for instance, wire bonding having a structure for holding a capillary therein, the capillary holding structure including an external screw section which protrudes from the end surface of the horn and a spacer mount which is larger in diameter than the external screw section and formed on the root portion of the external screw section. A ring-form spacer is mounted on the spacer mount, and the spacer has a shape that prevents the rotation of the spacer on the spacer mount and is formed so that its vertically opposing end portions are positioned above and below the capillary attachment hole, and the length between the horizontally opposing end portions of the spacer is shorter than the length of the vertically opposing end portions. In addition, a tightening member, such as a nut, is screwed on the external screw section so that a ring-form pressing part which is formed on the tightening member presses only against the vertically opposing end portions of the spacer, thus holding the capillary on the horn.

Capillary holding structure for an ultrasonic horn

An ultrasonic horn of a bonding apparatus quipped with a bonding tool attached to one end of the horn and a vibration-generating source such as an electrostrictive strain element, magnetostrictor, etc. attached to a bonding arm that supports the bonding horn. The ultrasonic horn is further provided with a vertical vibration adjuster which adjusts the vertical component of the vibration of the ultrasonic horn, and the vertical vibration adjuster includes a projection, recess, etc. provided at the end of the horn.

Bonding apparatus

A bonding apparatus used in manufacturing semiconductor devices, etc. including an ultrasonic horn mounted to a bonding arm of the bonding apparatus via a horn support. The ultrasonic horn is provided with a bonding tool at one end and a vibration-generating source at another end, and respective values of vibrational wavelengths on both sides of the horn support are set so that the value on the bonding tool side of the horn support is 7 or greater relative to a value of 3 on the opposite side of the horn support from the capillary. In other words, the distance from the horn support to the end of the vibration-generating source is set to be 1/4 of the wavelength, and the distance from the horn support to the end of the horn where the bonding tool is attached is set to be 3/4 of the wavelength.

Growing community of inventors

Kokubunji, Japan

Tadashi Akiike