Canon Kabushiki Kaisha

Tadanobu Nagami

Kenji Fujii

Junichi Kobayashi

Shuji Koyama

Yoshinori Tagawa

Jun Yamamuro

Hiroyuki Murayama

Masaki Ohsumi

Taichi Yonemoto

Hiroyuki Abo

Yoshinobu Urayama

Takeshi Terada

Masahisa Watanabe

Noriyasu Ozaki

Hajime Yamamoto

Masanori Takenouchi

Seiichiro Karita

Hiroshi Sugitani

Nobuyuki Sato

Masashi Miyagawa

Minoru Nozawa

Masaya Uyama

Makoto Watanabe

Masashi Kitani

Susumu Ito

Kunihiko Maeoka

Akira Tsujimoto

Mitsunori Toshishige

Yasuro Kashima

A perforated substrate having a first surface, a second (opposite) surface, a plurality of through holes running through the substrate from the first surface to the second surface and an etching object arranged on the first surface, is processed by forming a coating layer containing a resin material on the etching object, then allowing part of the resin material to drop into each of the through holes so as to close each of the through holes at least partly with the dropped resin material, then patterning the coating layer such that the coating layer is left on each of the through holes as mask while at least part of the coating layer covering the etching object is removed to expose the etching object; and etching the exposed etching object under a condition where each of the through holes is closed at least partly with the resin material.

Perforated substrate processing method and liquid ejection head manufacturing method

The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.

Method for producing liquid discharge head

A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

Liquid ejection head and method for manufacturing liquid ejection head

An ink jet head for performing recording by discharging inks comprises an element substrate provided with a plurality of discharge energy generating elements for discharging the inks and a grooved member integrally having discharge ports, a plurality of grooves constituting ink flow passages provided corresponding to the discharge energy generating elements, a plurality of recess portions constituting a plurality of liquid chambers for supplying the inks to a plurality of ink flow passages, and separation grooves provided between the plurality of recess portions to separate between the recess portions constituting the liquid chambers. The element substrate and the groove member being jointed together. The liquid chambers are separated by the separation grooves for preventing the inks from flowing between the liquid chambers.

Ink jet recording head, an ink jet unit and an ink jet apparatus using

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Yamato, Japan

Tadanobu Nagami