Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Ag (1 from 110 patents)
1 patent:
1. 11854792 - Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures