Taiwan Semiconductor Manufacturing Comp. Ltd.

Ta-Meng Kuan

Yi-Neng Chang

Ting-Yu Chiu

A workpiece handling system includes a carrier, a lower imaging device, and a transfer mechanism. The carrier is configured to carry at least one workpiece. The lower imaging device is disposed beside the carrier. The transfer mechanism is movably disposed over the lower imaging device and the carrier, wherein the transfer mechanism includes an end effector configured to pick and place the at least one workpiece and an upper imaging device disposed beside the end effector. A method of calibrating a workpiece handling system and a method of manufacturing a semiconductor package are also provided.

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Taoyuan, Taiwan

Ta-Meng Kuan