University of Delaware

T W Russell

Bill N Baron

Richard E Rocheleau

Allen M Barnett

James V Masi

An apparatus to deposit material on a substrate, such as in the making of thin solar cells, consists of two chambers. A manifold chamber having a plurality of spaces nozzles assures efficient and uniform deposition on a substrate. The rate of depositions is controlled by an orifice in a passageway connecting the manifold chamber to an evaporation chamber.

Apparatus for continuous deposition by vacuum evaporation

An apparatus to deposit material on a substrate, such as in the making of thin film solar cells, consists of two chambers. A manifold chamber having a plurality of spaced nozzles assures efficient and uniform deposition on a substrate. The rate of depositions is controlled by an orifice in a passageway connecting the manifold chamber to an evaporation chamber.

Method for continuous deposition by vacuum evaporation

A technique for manufacturing durable, reliable solar cells by a continuous process suitable for large-scale manufacture involves, in substance, providing a reel of thin metal foil substrate and forming on the substrate a series of layers operative to form a photovoltaic junction, short prevention blocking layers, contacts and integral encapsulation. The foil substrate is processed as a continuous reel substantially until final testing at which point, if desired, it can be cut into individual cells for deployment. In comparison with a batch process, the continuous technique can reduce manufacturing cost by as much as a factor of two.

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Newark, DE, United States of America

T W Russell