Commissariat a L'energie Atomique Et Aux Energies Alternatives

Ségoléne Olivier

Jean-Marc Fedeli

Yann Bogumilowicz

Pierre Brianceau

Thomas Magis

Alexis Abraham

A method of manufacturing an optical waveguide with a vertical slot including the steps of a) providing a substrate successively including an electric insulator layer and a crystalline semiconductor layer, b) forming a trench on the semiconductor layer to expose the electric insulator layer and defining first and second semiconductor areas on either side, step b) being executed so that the first semiconductor area has a lateral edge extending across the entire thickness of the semiconductor layer, c) forming the dielectric layer having the predetermined width across the entire thickness of the lateral edge, the method being remarkable in that the trench formed at step b) is configured so that the second semiconductor area forms a seed layer.

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Saint Martin le Vinoux, France

Ségoléne Olivier