Stichting Imec Nederland

Imec

Interuniversitair Micro-Elektronica Centrum Vzw

Sywert Brongersma

Mercedes Crego Calama

Peter Offermans

Roman Vitushinsky

Gerald Beyer

Jaime Gomez Rivas

Marcel Zevenbergen

Daan Wouters

Devrez Mehmet Karabacak

Gabriele Vecchi

Ling Sieben-Xu

An electrochemical ethylene sensor and method for ethylene sensing are disclosed. In one aspect, an electrochemical ethylene sensor includes a working electrode and a counter electrode on an electrically insulating substrate. An ionic liquid layer covers the working electrode and counter electrode. In one method, a voltage is applied to the working electrode which is equal to or lower than the voltage required for the onset of oxidation of the material of the working electrode, for example, in the range spanning 700 mV before the onset of oxidation of the material of the working electrode.

Electrochemical ethylene sensor and method for monitoring ethylene

The disclosed technology generally relates to a sensor and methods for making and using the same, and more particularly relates to a sensor configured to sense the presence of at least one fluidum. In one aspect, a sensor for sensing a fluidum in a space adjoining the sensor comprises a two-dimensional electron gas (2DEG) layer stack. The sensor additionally comprises a gate lying adjacent to at least part of the 2DEG layer stack and configured to electrostatically control the electron density of a two-dimensional electron gas (2DEG) in the 2DEG layer stack. The sensor further comprises a source electrode contacting the 2DEG layer stack for electrically contacting the 2DEG. The 2DEG layer stack of the sensor comprises a contact surface contacting the space and provided to contact molecules of the fluidum which is desired to be detected, and the gate of the sensor comprises a doped semiconductor bottom layer of the 2DEG layer stack in electrical contact with at least one gate electrode, where the doped semiconductor bottom layer being located at a side of the 2DEG layer stack opposing the contact surface.

Two-dimensional electron gas sensor and methods for making and using the sensor

The application describes methods and apparatus for chemical sensing, e.g. gas sensing, which have high sensitivity but low power operation. A sensor is described having a flexible membrane comprising a III/N heterojunction structure configured so as to form a two dimensional electron gas within said structure. A sensing material is disposed on at least part of the flexible membrane, the sensing material being sensitive to one or more target chemicals so as to undergo a change in physical properties in the presence of said one or more target chemicals. The sensing material is coupled to said heterojunction structure such that said change in physical properties of the sensing material imparts a change in stress within the heterojunction structure which modulates the resistivity of the two dimensional electron gas.

Chemical sensor having a flexible member with III/N heterojunction

A Sensor for sensing the presence of at least one fluidum in a space adjoining the sensor is disclosed. In one aspect, the sensor has a two-dimensional electron gas (2DEG) layer stack, a gate electrode overlaying at least part of the 2DEG layer stack for electrostatically controlling electron density of a 2DEG in the 2DEG layer stack and a source and a drain electrode contacting the 2DEG layer stack for electrically contacting the 2DEG, wherein a detection opening is provided in between the gate electrode and the 2DEG layer stack and wherein the detection opening communicates with the space through a detection opening inlet such that molecules of the fluidum can move from the adjoining space through the detection opening inlet into the detection opening where they can measurably alter a electric characteristic of the 2DEG.

Sensor for sensing the presence of at least one fluidum

A configuration is disclosed. In one aspect, the configuration includes a substantially planar electrode layer, in a first plane. The configuration further includes a substantially planar two-dimensional electron gas (2DEG) layer electrically connected in series with the electrode layer. The 2DEG layer is provided in a second plane substantially parallel with the first plane and located at a predetermined distance, in a direction orthogonal to the first plane, from the first plane. The 2DEG layer and the electrode layer are patterned such that the electrode layer overlays a part of the 2DEG layer, wherein the predetermined distance between the first plane and the second plane is selected to be sufficiently small for allowing electrostatic interaction between the electrode layer and the 2DEG layer.

Configuration, a sensing element with such configuration, electrochemical sensor comprising such sensing element and method for electrochemical sensing using such electrochemical sensor

The present disclosure relates to a gas sensor including a first layer and a second layer superimposed on each other along an interface between the two layers. The first layer includes an array of nanoparticles along the interface, the nanoparticles provided so as to allow, upon illumination with electromagnetic radiation, long range diffractive coupling of surface plasmon resonances resulting in a surface lattice resonance condition. The second layer includes a material that, when exposed to at least one predetermined gas, detectably affects the surface lattice resonance condition. The material of the second layer preferably has a porosity of at least 10%.

Gas sensor with a porous layer that detectably affects a surface lattice resonant condition of a nanoparticle array

Methods and sensors for detecting the presence and/or concentration of an analyte are disclosed. In one aspect, a sensing element for use in a sensor is disclosed. The sensing element comprises a resonant cavity device configured to emit optical radiation at an initial power level, a sensing layer exhibiting an initial refractive index, and a detector. The sensing layer is configured to absorb or adsorb an analyte and, in response to absorbing or adsorbing the analyte, exhibit a modified refractive index that differs from the initial refractive index. The resonant cavity device is further configured to, in response to the sensing layer absorbing or adsorbing the analyte, emit optical radiation at a modified power level based on the modified refractive index. The detector is configured to detect the modified power level.

Sensor, method for detecting the presence and/or concentration of an analyte using the sensor, and use of the method

A sensor device is provided for determining the presence and/or amount of at least one component in a fluid. The sensor device comprises at least one sensor unit, the at least one sensor unit comprising at least one elongated nanostructure and a dielectric material surrounding the at least one elongated nanostructure. The dielectric material is such that it is selectively permeable for one of the at least one component and is capable of sensing the component permeated through the dielectric material. The sensor device according to preferred embodiments shows good sensitivity and good mechanical strength. The present invention furthermore provides a method for manufacturing such a sensor device and a method for determining the presence and/or amount of at least one component in a fluid using such a sensor device.

Sensor device comprising elongated nanostructures

The present invention relates to a method for obtaining enlarged Cu grains in small trenches. More specifically it related to a method for creating enlarged copper grains or inducing super secondary grain growth in electrochemically deposited copper in narrow trenches and/or vias to be used in semiconductor devices.

Growing community of inventors

Eindhoven, Netherlands

Sywert Brongersma