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Matsushita Electric Industrial Co., Ltd.

Syuji Ueda

Shinichi Mizuguchi

Noritsugu Umehara

Keiji Nagata

Yoshiyuki Tanigawa

Kouji Kato

A microscopic grinding device grinds a workpiece at ultrahigh precision with the use of magnetic grinding fluid actuated microscopically in three dimensional directions by Z- and XY-axis actuators. The magnetic grinding fluid is magnetically supported between a grinding member and the workpiece by the magnetic field. Because magnetic field is generated to form a magnetic circuit within the device itself where no workpiece is necessary to form the magnetic circuit, the device can be used with equal results even with workpieces made from non-magnetic material. The pressure applied to the workpiece by the grinding member via the magnetic grinding fluid is detected by a load cell for feeding back a signal indicative of the detected pressure to the controller. The controller controls the actuators to actuate the grinding member such that the pressure applied from the grinding member, via the magnetic fluid, to the workpiece is maintained within a predetermined range.

Microscopic grinding method and microscopic grinding device

In a sliding table 40 slidingly mounted on a guide block 6 with an air bearing therebetween, a moving bracket 38, which is driven by a rotation of a driving screw rod 35 in an axial direction of the latter, is coupled with an elastic coupling means. The elastic coupling means is formed by abutting the moving bracket 38 to the faces of the holding blocks 41 and 42 of the sliding table 40, with a rubber sheet 43 and 44 or the like springy means inbetween.

Table sliding apparatus

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Neyagawa, Japan

Syuji Ueda