Sii Nanotechnology Inc.

Shizuoka University

Syuichi Kikuchi

Masatoshi Yasutake

Osamu Takaoka

Takuya Nakaue

Futoshi Iwata

There is a micro-machining apparatus for removing the micro-machining dust generated at the time of machining while a workpiece M is machined within a liquid W using a probe tip. The apparatus includes a stage on which the workpiece is to be placed; a probe having the probe tip, a machining device having a moving means that moves the stage and the probe relative to each other to machine the workpiece by the probe tip, and a micro-machining dust removing device having a first electrode and a second electrode that are arranged in the liquid so as to sandwich the probe tip therebetween, and a voltage application means that applies a voltage to between both the electrodes to move the micro-machining dust in the liquid.

Growing community of inventors

Chiba, Japan

Syuichi Kikuchi