Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Office National D'etudes Et De Recherches Aerospatiales

Onera

Sylvain Rommeluere

Nicolas Guerineau

Manuel Fendler

Florence De La Barriere

Joël Deschamps

Gilles Lafargues

A micro-machined optical measuring device including: a set of photosensitive detector elements situated on a given face of a first support; a second support, assembled to the first support, forming a prism and including a first face through which a visible radiation is intended to penetrate and a second face, forming a non-zero angle &#x3b8; with the first face and a non-zero angle &#x3b1; with the given face of the first support, the second face being semi-reflective, the first support and the second support being positioned such that an interferometric cavity is made between the second face and the given face, the distance between the given face of the first support and the second face of the second support varying regularly.

Micro-machined imaging interferometer having a static interferometric cavity

The invention aims to integrate a two-wave stationary interferometer on a photodetector during fabrication in order to constitute a miniature stationary Fourier transform spectrometer. The interferometer essentially comprises a plate having a first plane face coinciding with an image plane on semiconductor photosensitive elements and a second face that is not parallel to the first face. The second face reflects a wave that has a phase difference relative to the incident wave interfering with it that is a function of the local thickness of the plate.

Stationary fourier transform spectrometer

Growing community of inventors

Massy, France

Sylvain Rommeluere