Fogale Nanotech

Unity Semiconductor Corporation

Sylvain Petitgrand

Alain Courteville

Gilles Fresquet

Eric Legros

A device for interface shape of an optical element including at least one low-coherence light source, at least one optical sensor, an interferometric device illuminated by the light source and configured for shaping at least one measurement beam and at least two reference beams, directing one measurement beam to the element to pass through the interfaces, and directing the light from at least two interfaces to the sensor or sensors, each sensor globally configured for detecting at least two interference signals resulting respectively from interferences between the measurement beam reflected by one of the at least two interfaces and one of the reference beams; the measurement device also including a positioner for positioning a coherence area at the level of each interface and a digital processor for producing, from the interference signals, an item of information of the shape of each interface according to a field of view.

Device and method for measuring interfaces of an optical element

A method for measuring interfaces of an optical element, forming part of a plurality of similar elements including at least one reference optical element, the method implemented by a device, the method including:

Method and device for measuring interfaces of an optical element

A device for positioning an integrated circuit wafer includes: Also provided is an inspection equipment for an integrated circuit wafer implementing such a positioning device.

Growing community of inventors

Caissargues, France

Sylvain Petitgrand