Lynred

Scientifique (cnrs)

Universite Paris-saclay Centre National De La Recherche

Centre National De La Recherche Scientifique

Université Paris-saclay

Sylvain Lemettre

David Bunel

Johan Moulin

Alain Bosseboeuf

A method of manufacturing a microelectromechanical system includes forming of an electromechanical element on a substrate. The method further includes preparation of an encapsulation package to form a sealed cavity integrating the electromechanical element, with the sealed cavity having a volume smaller than 10 mm. The method includes physical vapor deposition of a getter film on the substrate or on a wall of the encapsulation package so that the getter film has a specific absorption surface area smaller than 8 m/g, and sealing of the encapsulation package on the substrate by means of a thermal sealing cycle having a temperature enabling to activate said getter film.

Micro-electromechanical system and method for producing same

A hermetic housing is disclosed () for an optoelectronic component () or a MEMS device configured to form an enclosure () within which a low pressure or vacuum prevails. The hermetic housing includes: an optical window () transparent for at least one wavelength of interest (&#x3bb;); and a layer of a getter material () configured to capture gases present in said enclosure and deposited on the optical window opposite the enclosure. This layer of getter material has a thickness (e_t), greater than 60 nanometers, and a porosity (P) in the range from 10 to 70% to satisfy the following relation: (1&#x2212;P)*e_t&#x3c;&#x3bb;/2&#x3c0;k with &#x3bb; corresponding to the at least one wavelength of interest, and k corresponding to the extinction coefficient of the material of the layer of getter material for the at least one wavelength of interest of the optical window.

Hermetic housing comprising a getter, optoelectronic component or MEMS device incorporating such a hermetic housing and associated production method

Growing community of inventors

Massy, France

Sylvain Lemettre