Infineon Technologies Canada Inc.

Syed Faizan-ul-Haq Gilani

Iman Abdali Mashhadi

Regina Inyangat Akudo

Automatic maverick screening of a subject wafer. An inspection pass status is acquired for each of multiple die on a subject wafer. For each of multiple zones of the subject wafer, a pass/fail percentage of the dies within the corresponding zone is compared with an expected pass/fail percentage for the corresponding zone. This expected pass/fail percentage is dependent on a history of pass/fail percentages for previous dies at a same corresponding zone for previously screened wafers. This comparison results in a deviation between the measured pass/fail percentage of the corresponding zone and the expected pass/fail percentage of the corresponding zone. Then, the subject wafer is automatically identified as a maverick wafer if the deviation of a predetermined number or more of the multiple zones falls outside of a corresponding deviation tolerance.

Growing community of inventors

Stittsville, Canada

Syed Faizan-ul-Haq Gilani