Systems on Silicon Manufacturing Company Pte. Ltd.

Swee Keng Ang

Hanif Bin Mohamed Mohamed

Joo Ming Jackson Tan

A system and method for measuring tool performance of a multi-path cluster semiconductor fabrication tool. The system comprises a status data unit for receiving up or down status data for each element of the tool for respective operational time periods; a performance value assignment unit for assigning a performance value to the tool for each time period based on the status data of the elements during said each time period; and an operational uptime unit for determining an operational uptime for a period covering the time periods of the tool based on multiplying the respective time periods with the corresponding assigned performance values.

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Singapore, Singapore

Swee Keng Ang