Industrial Technology Research Institute

Sway Chuang

Morris P F Liang

Frank K C Fan

Chen Chung Kao

Wae-Honge Chen

Morris Liang

Frank Fan

A hydrogel-driven micropump, comprising: two fluid chambers; a fluid channel, connecting the two fluid chambers; a first substrate plate and a second substrate plate, which are glass wafers produced by micromechanical working, each having accommodation chambers which are filled in hydrogel which are placed next to the two fluid chambers and connected by inward extending bridges, with electric terminals leading to the accommodation chambers; a middle substrate, sandwiched between the first and second substrate plates and made by a bulk micromachining process, having separated accommodation chambers close to ends thereof. A separating block is placed between the accommodation chambers. The middle substrate between the first and second substrate plates forms a micropump body. All of the substrates are separated by membranes. The accommodation chambers for electrophoretic fluid are located between the membranes and the first and second substrate plates, respectively, and insulating material. An electrophoretic fluid channel is left between the membranes and the bridges. The fluid channel is placed within the middle substrate between the membranes. The first substrate plate has through holes from outside to the two fluid chambers, allowing fluid to be injected.

Hydrogel-driven micropump

A high density multi-layer microcoil includes a substrate, a multi-layer coil winding, a magnetic core and a dry film photoresist structure. The multi-layer coil winding and the magnetic core are supported by the dry film photoresist structure. The fabrication process is using photolithography process to form a dry film photoresist structure with a coil tunnel having coil elements perpendicular to the substrate and two outlets at ends of the tunnel; and injecting a conductive material with a low melting point into the tunnel and forming the coil winding.

Process for fabricating a high density multi-layer microcoil

High density multi-layer microcoil and method for fabricating the same

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Hsinchu Hsien, Taiwan

Sway Chuang