Applied Materials, Inc.

Sven Schramm

Martin A Hilkene

Amir Bayati

Gerd Hoffmann

Roland Trassl

Gerd Kleideiter

Matthias List

Udo Schreiber

Susanne Schläfer

Elias Martinez

Embodiments disclosed herein include a moisture detection module. In an embodiment, the moisture detection module comprises an optical bandpass filter configured to be optically coupled to a light source, where a passband is centered at 309 nm. In an embodiment, the moisture detection module further comprises a detector optically coupled to the optical bandpass filter.

Chamber moisture control using narrow optical filters measuring emission lines

An evaporation apparatus for depositing material on a substrate by a drum is described. The evaporation apparatus includes a first set of evaporation crucibles aligned in a first line a first direction for depositing evaporated material on the substrate; a first gas supply pipe extending in the first direction being arranged between at least one of the evaporation crucibles of the first set of evaporation crucibles and the drum; and a second gas supply pipe extending in the first direction for providing a gas between the first set of evaporation crucibles and the drum with openings shaped and positioned to improve the uniformity of the deposition of the material.

Evaporation apparatus with gas supply

Thermal management of film deposition processes. In one aspect, a deposition system includes a vacuum chamber defining an evacuated interior volume, a deposition source disposed within the interior volume, a substrate holder disposed within the interior volume and arranged to hold a substrate with a first surface of the substrate facing the deposition source and a second surface of the substrate disposed facing away from the deposition source, and a heat sink disposed to have a first side of the heat sink in radiative thermal contact with the second surface of the substrate held by the substrate holder, the first side of the heat sink comprising a collection of features having a longitudinal dimension that is four or more times larger than a lateral dimension between the features, the features thereby dimensioned and aligned to reflect, multiple times in succession, radiative thermal emissions of the second surface of the substrate.

Thermal management of film deposition processes

The invention relates to a silver low-E coating for glass which is temperable and can be applied by means of sputter processes onto the glass. The individual layers of the coating are cost-effective standard materials. One embodiment of the invention for example is comprised of a glass substrate, an SiNlayer disposed thereon of a thickness of approximately 15 nm, a TiOlayer of 15 nm thickness on the SiNlayer, a 12.5 nm thick Ag layer on the TiOlayer, a NiCrOlayer of approximately 5 nm thickness on the Ag layer and a terminating 45 nm thick SiNlayer.

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Kahl am Main, Germany

Sven Schramm