Motorola Corporation

Infineon Technologies Sc300 Gmbh & Co., Kg

Sven Hahn

Michael Lering

Mathias Schulz

Gregor Kuebart

A light curtain system is provided for establishing a protective light curtain for a tool in a system for processing objects such as wafers, and is particularly provided as a safety device for an operator of the tool. The light curtain system includes a first light curtain component of invisible light beams. A receiver and an emitter form edges of the protective light curtain from the invisible light beams. In addition, a second light curtain component of visible light beams is provided. The visible light beams are directed and transmitted adjacent and in parallel to the light beams of invisible light for forming a part of the protective light curtain and for making the protective light curtain visible for an operator. The second light curtain component of visible light beams is activated at least temporarily.

Light curtain system for establishing a protective light curtain, tool and system for processing objects and method for loading/unloading a tool

A transportation system ( ) has a wafer container ( ), such as a FOUP, to rest on a support surface ( ). The container has kinematic coupling grooves, and the support surface has kinematic coupling pins. Grooves and pins are at least partially electrically conductive and allow coupling an electric device ( ) associated with the container to an electrical circuit ( ) associated with the support surface. Device and circuit in combination allow to perform a variety of functions, such as monitoring the correct position of the container, and exchanging signals.

Wafer container having electrically conductive kinematic coupling groove, support surface with electrically conductive kinematic coupling pin, transportation system, and method

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Munich, Georgia

Sven Hahn