Huettinger Elektronik Gmbh & Co. Kg

Ulvac, Inc.

Hüttinger Elektronik Gmbh & Co. Kg

Sven Axenbeck

Peter Wiedemuth

Markus Bannwarth

Martin Steuber

Lothar Wolf

Alfred Trusch

Gerhard Zähringer

An arc detection means for detecting arcs in a plasma process includes at least one comparator to which an evaluation signal such as an output signal or an internal signal of an AC generator relating to the output signal and a reference value are supplied. The comparator is connected to a logic component that generates a signal for an arc suppression device.

Method and device for detecting arcs

New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.

Method of arc detection

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Neuenburg, Germany

Sven Axenbeck