Triquint Semiconductor Corporation

Suzanne Combe

George Grama

Kurt George Steiner

Alan Sangone Chen

Rodolfo E Chang

Robert Aigner

Taeho Kook

Benjamin P Abbott

Ian Y Yee

Natalya F Naumenko

Charles E Carpenter

Julien Gratier

Timothy Daniel

Jean Briot

Embodiments described herein may provide an acoustic wave device, a method of fabricating an acoustic wave device, and a system incorporating an acoustic wave device. The acoustic wave device may include a transducer disposed on a substrate, with a contact coupled with the transducer. The acoustic wave device may further include a wall layer and cap that define an enclosed opening around the transducer. A via may be disposed through the cap and wall layer over the contact, and a top metal may be disposed in the via. The top metal may form a pillar in the via and a pad on the cap above the via. The pillar may provide an electrical connection between the pad and the contact. In some embodiments, the acoustic wave device may be formed as a wafer-level package on a substrate wafer.

Acoustic wave device

A SAW filter is fabricated with input and output transducers on a piezoelectric substrate and an epoxy based photo-definable acoustic absorber on the substrate for suppressing unwanted acoustic waves. The photo-definable acoustic absorber has a viscosity in a range from about 50 centistokes to 12000 centistokes and a thickness from about 10 microns to 120 microns. One acoustic absorber includes an SU-8 family member epoxy.

Acoustic wave filter manufacturing method using photo-definable epoxy for suppression of unwanted acoustic energy

Disclosed embodiments include a surface acoustic wave device having electrode period, electrode width, and/or ratio of electrode width to electrode period varied in a prescribed manner.

High coupling, low loss saw filter and associated method

A SAW filter comprising an input transducer and an output transducer fabricated on a piezoelectric substrate and an epoxy based photo-definable acoustic absorber on the substrate for suppressing unwanted acoustic waves. The photo-definable acoustic absorber has a viscosity in a range from about 50 centistokes to 12000 centistokes and a thickness from about 10 microns to 120 microns. One acoustic absorber includes an SU-8 family member epoxy.

Acoustic wave filters using photo-definable epoxy for suppression of unwanted acoustic energy

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Longwood, FL, United States of America

Suzanne Combe