Canon Kabushiki Kaisha

Nec Corporation

Japan Aerospace Exploration Agency

Susumu Yasuda

Takayuki Yagi

Futoshi Hirose

Yasuhiro Shimada

Takahisa Kato

Junichi Seki

Takao Kusaka

Nobuki Yoshimatsu

Hidemasa Mizutani

Takashi Ushijima

Yoshitaka Zaitsu

Yoshikatsu Ichimura

Shunichi Shido

Takeshi Imamura

Toshihiko Takeda

Ryo Kuroda

Toru Nakakubo

Takayuki Teshima

Kazutoshi Torashima

Atsunori Terasaki

Yoshihiro Ishibe

Takeo Yamazaki

Takahiro Ezaki

Toshiyuki Etoh

Disclosed is a novel autonomous excavating apparatus capable of solving conventional problems. The autonomous excavating apparatus comprises an apparatus body including a lower bodyformed in a cylindrical shape and combined with a conical-shaped lower end, and a spiral bladeprovided on an outer peripheral surface of the lower bodyin the form of a right-handed screw. The lower bodyhas an internal space provided with a wheelwhich has a rotary shaftrotatably supported relative to the lower bodythrough bearings. A motoris fixed to the lower bodyat a position above the wheel, and an output shaft of the motor is coaxially connected to the rotary shaft. Thus, the motorcan drivingly rotate the wheelrelative to the lower body

Autonomous excavating apparatus

In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

Scanning probe apparatus

A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a memory for storing characteristic information of the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

A drive stage for a scanning probe apparatus includes a supporting member, a plurality of movable portions fixed to the supporting member, and a plurality of drive elements configured and positioned to drive the plurality of movable portions. The drive stage is driven in a direction in which inertial forces of the plurality of movable portions are mutually canceled during drive of the plurality of drive elements. The drive stage further includes an inertial force difference detection member configured and positioned to detect a difference in inertial force between the plurality of movable portions, and an inertial force adjustment member configured and positioned to effect inertial force adjustment so that the difference in inertial force between the plurality of movable portions is decreased on the basis of a detection output of the inertial force detection member.

Drive stage for scanning probe apparatus, and scanning probe apparatus

A scanning probe apparatus for obtaining information of a sample, recording information in the sample, or processing the sample with relative movement between the sample and the apparatus, the apparatus is constituted by a probe; and a scanning stage including a drive element for moving a sample holding table for holding the sample and a movable portion movable in a direction in which an inertial force generated during movement of the sample holding table is cancelled. The scanning stage further includes a drive circuit for driving the scanning stage and is detachably or replaceably mountable to a main assembly of the apparatus.

The present invention provides a resonance type micro-oscillating member capable of retraining a fluctuation of angular velocity, and specifically provides a micro-oscillating member, which is a nested micro-oscillating member, wherein there exist a reference oscillation mode which is the characteristic oscillation mode of a reference frequency, and an even numbered oscillation mode which is the characteristic oscillation mode of a frequency being approximate even number times the reference frequency.

Micro-oscillating member, light-deflector, and image-forming apparatus

A scanning probe apparatus for obtaining information of a sample or processing the sample with relative movement between the sample and the apparatus includes a sample stage for holding the sample, and a drive stage with a probe, a cantilever supporting the probe, a cantilever holding member for holding the cantilever, and a drive element for driving the probe in three directions perpendicular to each other. In addition, a movable portion surrounds the drive element and is positioned outside of the drive element, with the movable portion movable in a direction in which an inertial force generated during movement of the probe is canceled. The drive stage includes an optical path, through which light passes, provided inside of the drive stage.

Scanning probe apparatus and drive stage therefor

A potential sensor including first and second detection electrodes opposed to an object of which a potential is to be measured, and a movable shutter so positioned between the detection electrodes and the potential-measured object with gaps thereto. The movable shutter can assume a first state and a second state. The first detection electrode is exposed to the potential-measured object wider when the movable shutter assumes the second state. The second detection electrode is exposed to the potential-measured object narrower when the movable shutter assumes the first state than when the movable shutter assumes the second state.

Potential sensor

A fluid delivery device is provided which comprises a microchannel device for cutting out a certain amount of a sample from a micorochannel by controlling a valve opening. The fluid delivery device has a valve for controlling a flow of a fluid, comprising a flow channel for the fluid, and a valve in the flow channel, wherein the valve operates in accordance with a pressure difference between the upstream side and downstream side of the valve caused by the flow of the fluid through the flow channel, allowing the fluid to flow when the pressure difference is lower than a prescribed value P, and intercepting the fluid not to flow when the pressure difference is Por more.

Liquid delivery device

An optical scanning system includes a deflecting device to scanningly deflect a light beam from a light source in a main scan direction, and an imaging optical system for imaging, upon a surface to be scanned, the light beam deflected by a deflecting surface of the deflecting device. First and second differences in wavefront aberration are respectively produced as a result of reflection by the deflecting surface and as a result of transmission through the imaging optical system. At least one optical surface inside the imaging optical system is non-arcuate in a main scan section, so as to assure that the first and second phase differences are made opposite to each other.

Optical scanning system and image forming apparatus using the same

The tiltable-body apparatus including a frame member, a tiltable body, and a pair of torsion springs having a twisting longitudinal axis. The torsion springs are disposed along the twisting longitudinal axis opposingly with the tiltable body being interposed, support the tiltable body flexibly and rotatably about the twisting longitudinal axis relative to the frame member, and include a plurality of planar portions, compliant directions of which intersect each other when viewed along a direction of the twisting longitudinal axis. A center of gravity of the tiltable body is positioned on the twisting longitudinal axis of the torsion springs.

Growing community of inventors

Tokyo, Japan

Susumu Yasuda